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List of Wafers/ Mask plates

List of Wafers/ Mask plates

# Material Size P/N Orientation Resistivity (Ω-cm) Surface
1 Si 2 Inch N <100> 0.01--0.1 SSP
2 Si 2 Inch N <100> 0.1--0.2 SSP
3 Si 2 Inch N <100> 0.01--0.02 SSP
4 Si 2 Inch N <100> 1--5 SSP
5 Si 2 Inch N <100> 4--7 SSP
6 Si 2 Inch N <100> 4--7 DSP
7 Si 2 Inch N <110> 4--7 SSP
8 Si 2 Inch N <100> 1--10 SSP
9 Si 2 Inch N <100> 40--100 DSP
10 Si 2 Inch N <100> <0.005 SSP
11 Si 2 Inch N <100> 10--30 SSP
12 Si 2 Inch N <100> 0.05--4 DSP
13 Si 2 Inch N <100> 0.01 SSP
14 Si 2 Inch P <100> 0.01--0.1 SSP
15 Si 2 Inch P <100> 0.1--0.2 SSP
16 Si 2 Inch P <100> 0.1--0.6 SSP
17 Si 2 Inch P <100> 0.01--0.02 SSP
18 Si 2 Inch P <100> 0.001--0.002 SSP
19 Si 2 Inch P <100> 0.001--0.004 SSP
20 Si 2 Inch P <100> 0.001--0.005 SSP
21 Si 2 Inch P <100> 0.0005--0.001 SSP
22 Si 2 Inch P <100> <0.005 SSP
23 Si 2 Inch P <110> 1--5 DSP
24 Si 2 Inch P <100> 1--10 SSP
25 Si 2 Inch P <100> 4--7 DSP
26 Si 2 Inch P <100> 4--7 SSP
27 Si 2 Inch P <110> 4--7 DSP
28 Si 2 Inch P <100> 10--30 SSP
29 Si 2 Inch P <100> 40--100 DSP
30 Si 2 Inch P <111> 0.1--0.6 SSP
31 Si 2 Inch P <100> 1--5 SSP
32 Si 2 Inch P <100> >1000 SSP
33 Si 2 Inch P <111> >1000 SSP
34 Si 4 Inch P <100> 0.02--0.04 SSP
35 Si 4 Inch P <100> 1--5 SSP
36 Si 4 Inch P <100> 4--7 SSP
37 Si 4 Inch P <100> >1000 SSP
38 Si 4 Inch P <100> 1--10 DSP
39 Si 4 Inch P <100> 0.01--0.02 SSP
40 Si 4 Inch P <100> 0.1--0.2 SSP
41 Si 4 Inch N <100> 1--5 SSP
42 Si 4 Inch N <100> 1--10 SSP
43 Si 8 Inch NONE <100> 1--80 SSP
44 Si 2 Inch N <100> 0.1--0.02 SSP
45 Si 2 Inch P <100> 0.5--4 DSP
46 Si 2 Inch P <100> 0.0005--0.0001 SSP
47 Si 2 Inch P <100> >100 DSP
48 Si 2 Inch P <111> 4--6 SSP(Dopant)
49 Si 4 Inch N <100> 10000--99999 SSP
50 Si 4 Inch P <100> 10000--99999 SSP
51 Si 2 Inch P <100> >30K DSP
52 Si 4 Inch N <111> >30K SSP
53 Si 4 Inch P <111> >30K SSP
54 Si 4 Inch P <100> <0.01 SSP
55 Si 2 Inch P <110> 4--7 SSP
56 Si 2 Inch N <110> >1000 SSP
57 Si 4 Inch P <111> 0.001--0.005 SSP
58 Si 2 Inch N <111> >1000 SSP
59 Si 2 Inch N <100> >1000 SSP
60 Si 4 Inch P <100> 0.001--0.005 SSP
61 Si 4 Inch N <111> 0.001--0.005 SSP
62 Si 4 Inch P <100> 0.001--0.1 SSP
63 Si 8 Inch P <100> 1--80 SSP
64 Quartz 4 Inch NONE NONE C-Shaped DSP
65 Ge 2 Inch N <100> 1--10 SSP
66 Si 4 Inch P <111> 1--10 SSP
67 Si 4 Inch P <111> 10--20 SSP
68 Si 3 Inch P <100> 1--10 SSP
69 Si 3 Inch P <111> 1--10 SSP
70 Si 2 Inch N <100> 10--20 SSP
71 Mask Plate 3 Inch Iron Oxide NONE NONE NONE
72 Mask Plate 5 Inch Iron Oxide NONE NONE NONE
73 Si 2 Inch N <100> 40--100 SSP
74 Si 2 Inch N <100> <0.01 SSP
75 Si 2 Inch P <100> 0.5--4 SSP
76 Glass 4 Inch NONE NONE NONE NONE
77 Si 4 Inch P <100> <0.005 SSP
78 Si 2 Inch N <100> 0.001--0.005 SSP
79 Si 4 Inch N <100> 4--7 SSP
80 Si 4 Inch P <100> 4--7 DSP
81 Quartz 2 Inch NONE NONE NONE DSP
82 Si 2 Inch N <100> 0.001--0.002 SSP
83 Si 2 Inch P <100> >10000 SSP
84 Si 2 Inch P <111> 0.0005--0.001 SSP
85 SOI 4 Inch P <100> >10000 NONE
86 Si Fz (100 µm) 4 Inch Intrinsic/ Undoped <100> 10000--20000 SSP
87 Si 2 Inch N <111> 0.001--0.01 SSP
88 Si 2 Inch N <100> >10000 SSP
89 Si 2 Inch P <100> 4--7 SSP
90 Si 4 Inch P <100> 1--10 SSP
91 Si 4 Inch N <100> 0.001--0.002 SSP

***Non-CEN Project specific wafers

# Material Size P/N Orientation Resistivity (Ω-cm) Surface PL
1Ge2''P<100>1 - 10SSPS.Lodha
2Ge2''P<110>1 - 10SSPS.Lodha
3Ge2''P<111>1 - 10SSPS.Lodha
4Ge2''P<100>0.01 - 0.1SSPS.Lodha
5Ge2''P<111>0.02 - 0.1SSPS.Lodha
6Ge2''N<100>1 - 10SSPS.Lodha
7Ge2''N<100>0.01 - 0.1SSPS.Lodha
8Ge2''N<100>0.001 - 0.01SSPS.Lodha

Information about thickness of Wafers/Mask plates

  • Thickness of 2" Si wafers: 275 +/- 25 um
  • Thickness of 4" Si wafers: 525 +/- 20 um
  • Thickness of 4" Quartz wafers: -- 500 +/- 20 um
  • Thickness of 3" mask plates: 3 x 3 x 0.060"
  • Thickness of 5" mask plates: 5 x 5 x 0.060"

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Last updated on: 22-Jul-2022