Device NameLocationTemperatureHumidity
1ALD LLNano Lab22.50
21-01-2018 17:35:52
53.60
21-01-2018 17:35:52
2Chemistry RoomMicro1 lab21.80
21-01-2018 17:35:44
61.40
21-01-2018 17:35:45
3Etch CenturaAmat Lab20.40
21-01-2018 17:37:46
61.90
21-01-2018 17:37:47
4EVO SEM 18Micro1 Lab23.20
21-01-2018 17:35:42
48.20
21-01-2018 17:35:43
5HRXRDMICRO 122.50
21-01-2018 17:35:18
50.20
21-01-2018 17:35:19
6NCPRE Server E5:1CNCPRE S Room30.70
21-01-2018 17:36:28
38.90
21-01-2018 17:36:29
7RaithNano Litho L21.80
21-01-2018 17:34:21
57.50
21-01-2018 17:34:22
8SDSLEChar Lab 228.70
21-01-2018 17:35:21
44.80
21-01-2018 17:35:23
9Tube WasherChar Lab 226.60
21-01-2018 17:34:36
52.10
21-01-2018 17:34:37
10WorkbenchMicro 1 Lab22.50
21-01-2018 17:36:41
58.50
21-01-2018 17:36:41
11XPSMicro 2 Lab21.80
21-01-2018 17:37:45
59.90
21-01-2018 17:37:46