Device NameLocationTemperatureHumidity
1ALD LLNano Lab25.20
20-05-2018 15:14:13
59.90
20-05-2018 15:14:14
2Chemistry RoomMicro1 Lab25.90
20-05-2018 15:16:43
66.30
20-05-2018 15:11:44
3DSANano Litho L24.50
20-05-2018 15:14:08
62.90
20-05-2018 15:14:09
4EVO SEM 18Micro1 Lab21.80
20-05-2018 15:15:24
64.30
20-05-2018 15:15:25
5HRXRDMicro1 Lab26.60
20-05-2018 15:12:03
59.90
20-05-2018 15:12:04
6ICPCVDNano Lab22.50
20-05-2018 15:12:30
63.80
20-05-2018 15:12:30
7RaithNano Litho L23.20
20-05-2018 15:15:55
66.30
20-05-2018 15:15:55
8SDSLEChar Lab 227.30
20-05-2018 15:11:49
41.90
20-05-2018 15:11:50
9WorkbenchMicro 1 Lab27.30
20-05-2018 15:13:47
68.20
20-05-2018 15:13:48
10XPSMicro 2 Lab25.20
20-05-2018 15:14:55
60.40
20-05-2018 15:14:55