List of Wafers/ Mask plates
| Material | Size | P/N | Orientation | Resistivity (Ω-cm) | Surface |
---|
1 | Si | 2 | N | <100> | 0.01--0.1 | SSP |
2 | Si | 2 | N | <100> | 0.1--0.2 | SSP |
3 | Si | 2 | N | <100> | 0.01--0.02 | SSP |
4 | Si | 2 | N | <100> | 1--5 | SSP |
5 | Si | 2 | N | <100> | 4--7 | SSP |
6 | Si | 2 | N | <100> | 4--7 | DSP |
7 | Si | 2 | N | <110> | 4--7 | SSP |
8 | Si | 2 | N | <100> | 1--10 | SSP |
9 | Si | 2 | N | <100> | 40--100 | DSP |
10 | Si | 2 | N | <100> | <0.005 | SSP |
11 | Si | 2 | N | <100> | 10--30 | SSP |
12 | Si | 2 | N | <100> | 0.05--4 | DSP |
13 | Si | 2 | N | <100> | 0.01 | SSP |
14 | Si | 2 | P | <100> | 0.01--0.1 | SSP |
15 | Si | 2 | P | <100> | 0.1--0.2 | SSP |
16 | Si | 2 | P | <100> | 0.1--0.6 | SSP |
17 | Si | 2 | P | <100> | 0.01--0.02 | SSP |
18 | Si | 2 | P | <100> | 0.001--0.002 | SSP |
19 | Si | 2 | P | <100> | 0.001--0.004 | SSP |
20 | Si | 2 | P | <100> | 0.001--0.005 | SSP |
21 | Si | 2 | P | <100> | 0.0005--0.001 | SSP |
22 | Si | 2 | P | <100> | <0.005 | SSP |
23 | Si | 2 | P | <110> | 1--5 | DSP |
24 | Si | 2 | P | <100> | 1--10 | SSP |
25 | Si | 2 | P | <100> | 4--7 | DSP |
26 | Si | 2 | P | <100> | 4--7 | SSP |
27 | Si | 2 | P | <110> | 4--7 | DSP |
28 | Si | 2 | P | <100> | 10--30 | SSP |
29 | Si | 2 | P | <100> | 40--100 | DSP |
30 | Si | 2 | P | <111> | 0.1--0.6 | SSP |
31 | Si | 2 | P | <100> | 1--5 | SSP |
32 | Si | 2 | P | <100> | >1000 | SSP |
33 | Si | 2 | P | <111> | >1000 | SSP |
34 | Si | 4 | P | <100> | 0.02--0.04 | SSP |
35 | Si | 4 | P | <100> | 1--5 | SSP |
36 | Si | 4 | P | <100> | 4--7 | SSP |
37 | Si | 4 | P | <100> | >1000 | SSP |
38 | Si | 4 | P | <100> | 1--10 | DSP |
39 | Si | 4 | P | <100> | 0.01--0.02 | SSP |
40 | Si | 4 | P | <100> | 0.1--0.2 | SSP |
41 | Si | 4 | N | <100> | 1--5 | SSP |
42 | Si | 4 | N | <100> | 1--10 | SSP |
43 | Si | 8 | NONE | <100> | 1--80 | SSP |
44 | Si | 2 | N | <100> | 0.1--0.02 | SSP |
45 | Si | 2 | P | <100> | 0.5--4 | DSP |
46 | Si | 2 | P | <100> | 0.0005--0.0001 | SSP |
47 | Si | 2 | P | <100> | >100 | DSP |
48 | Si | 2 | P | <111> | 4--6 | SSP(DOPANT) |
49 | Si | 4 | N | <100> | 10000--99999 | SSP |
50 | Si | 4 | P | <100> | 10000--99999 | SSP |
51 | Si | 2 | P | <100> | >30K | DSP |
52 | Si | 4 | N | <111> | >30K | SSP |
53 | Si | 4 | P | <111> | >30K | SSP |
54 | Si | 4 | P | <100> | <0.01 | SSP |
55 | Si | 2 | P | <110> | 4--7 | SSP |
56 | Si | 2 | N | <110> | >1000 | SSP |
57 | Si | 4 | P | <111> | 0.001--0.005 | SSP |
58 | Si | 4 | N | <100> | 0.001--0.005 | SSP |
59 | Si | 2 | N | <111> | >1000 | SSP |
60 | Si | 2 | N | <100> | >1000 | SSP |
61 | Si | 4 | P | <100> | 0.001--0.005 | SSP |
62 | Si | 4 | N | <111> | 0.001--0.005 | SSP |
63 | Si | 4 | P | <100> | 0.001--0.1 | SSP |
64 | Si | 8 | P | <100> | 1--80 | SSP |
65 | Quartz | 4 | NONE | <NONE> | C-Shaped | DSP |
66 | Ge | 2 | N | <100> | 1--10 | SSP |
67 | Si | 4 | P | <111> | 1--10 | SSP |
68 | Si | 4 | P | <111> | 10--20 | SSP |
69 | Si | 3 | P | <100> | 1--10 | SSP |
70 | Si | 3 | P | <111> | 1--10 | SSP |
71 | Si | 2 | N | <100> | 10--20 | SSP |
72 | Mask Plate | 3 | Iron Oxide | <NONE> | NONE | NONE |
73 | Mask Plate | 5 | Iron Oxide | <NONE> | NONE | NONE |
74 | Si | 2 | N | <100> | 40--100 | SSP |
75 | Si | 2 | N | <100> | <0.01 | SSP |
76 | Si | 4 | N | <100> | <0.005 | SSP |
77 | Si | 2 | P | <100> | 0.5--4 | SSP |
78 | Glass | 4 | NONE | <NONE> | NONE | NONE |
79 | Si | 4 | P | <100> | <0.005 | SSP |
80 | Si | 2 | N | <100> | 0.001--0.005 | SSP |
81 | Si | 4 | N | <100> | 4--7 | SSP |
82 | Si | 4 | P | <100> | 4--7 | DSP |
83 | Quartz | 2 | NONE | <NONE> | NONE | DSP |
84 | Si | 2 | N | <100> | 0.001--0.002 | SSP |
85 | SOI | 4 | P | <100> | >10000 | NONE |
86 | Si Fz (100 µm) | 4 | Intrinsic/ Undoped | <100> | 10000--20000 | SSP |
87 | Si | 2 | N | <111> | 0.001--0.01 | SSP |
***Non-CEN Project specific wafers
| Material | Size | P/N | Orientation (Ω-cm) | Resistivity | Surface | PI |
---|
1 | Ge | 2'' | P | <100> | 1 - 10 | SSP | S.Lodha |
2 | Ge | 2'' | P | <110> | 1 - 10 | SSP | S.Lodha |
3 | Ge | 2'' | P | <111> | 1 - 10 | SSP | S.Lodha |
4 | Ge | 2'' | P | <100> | 0.01 - 0.1 | SSP | S.Lodha |
5 | Ge | 2'' | P | <111> | 0.02 - 0.1 | SSP | S.Lodha |
|
6 | Ge | 2'' | N | <100> | 1 - 10 | SSP | S.Lodha |
|
7 | Ge | 2'' | N | <100> | 0.01 - 0.1 | SSP | S.Lodha |
|
8 | Ge | 2'' | N | <100> | 0.001 - 0.01 | SSP | S.Lodha |
Information about thickness of Wafers/Mask plates
- Thickness of 2" Si wafers: 275 +/- 25 um
- Thickness of 4" Si wafers: 525 +/- 20 um
- Thickness of 4" Quartz wafers: -- 500 +/- 20 um
- Thickness of 3" mask plates: 3 x 3 x 0.060"
- Thickness of 5" mask plates: 5 x 5 x 0.060"