Wet chemistry processes are an important part of semiconductor device fabrication. Use of chemical solutions is often needed at a various stages of device production; most commonly during substrate clean and wet etching. For silicon (Si) based devices, many of the wet chemical processes are already well-defined (i.e. required solution concentration, etch rate, etc.) in technical literature. However, when working with new materials, development of wet chemical processes that are controllable and selective in their action is a critical part of device fabrication and research.
IITBNF provides a safe and well-equipped environment to develop and carry out all wet chemical processes necessary for device fabrication. In order to minimize cross-contamination and maintain process control, we have dedicated wet benches and clean stations for silicon placed away from general purpose stations. Complementary apparatus such as sonicators, spin coaters and hot plates are also provided at specific stations.
The following table lists the key wet chemistry equipment within IITBNF:
Instrument | Location | Contamination category | |
---|---|---|---|
1 | 2 inch RCA Clean Station | 6 | clean (for si) |
2 | TMAH wet etch station | 6 | gold contaminated |
3 | General Purpose Wet Bench (Wet Chemistry Lab) | 6 | gold contaminated |
4 | 4 inch RCA Clean Station | 6 | clean (for si) |
5 | General Purpose Wet Bench (EC Lab) | 10 | gold contaminated |
6 | Piranha Cleaning | 6 | clean (for si) |
7 | Wet bench_2” RCA , Piranha | 29 | clean |
8 | Wet bench_Metal etching | 29 | gold contaminated |
9 | Wet bench_Solvents | 29 | gold contaminated |
10 | Schlenk Line (1)_Fume Hood 1 | 8 | gold contaminated |
11 | 4-arm glove box_7.1 lab | 8 | gold contaminated |
12 | 2-arm Glove Box | 31 | gold contaminated |
13 | Nano Wet Bench | 19 | clean |
14 | 1.2 Lab wet bench | 21 | clean |