Equipment Status

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2D Materials and Devices Lab
LIC : Deepti Rukade(NH), Himani Jawa, Kartikey Thakar
System NameSystem OwnerFaculty in-chargeLocationStatus
1 2-arm Glove Box
(Open access)
Pankajkumar Gound
Srilagna Sahoo (H)
Saurabh Lodha2D Materials and Devices LabWorking
2 2D Materials CVD
(Controlled access)
Sera Sen (NH)
Saurabh Lodha2D Materials and Devices LabNot Working
3 LabRAM HR Evolution-RAMAN
(Controlled access)
Abin Varghese
Saurabh Lodha2D Materials and Devices LabWorking
4 Optical Setup (micro-PL)
(Controlled access)
Abin Varghese
Srilagna Sahoo (H)
Saurabh Lodha2D Materials and Devices LabPartially Working
5 Phoenix
(Open access)
Chandan Samanta (NH)
Saurabh Lodha2D Materials and Devices LabNot Working
6 Wire bonder (TPT HB05)_Gold
(Controlled access)
Pankajkumar Gound
Srilagna Sahoo (H)
Saurabh Lodha2D Materials and Devices LabWorking

7.1 Lab
LIC : Deepti Rukade(NH), Pankajkumar Gound
System NameSystem OwnerFaculty in-chargeLocationStatus
7 2 inch general purpose annealing furnace_Fume hood 3
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
8 4-arm glove box_7.1 lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
9 Atmospheric Furnace_7.1 Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
10 Contact Angle System (Data Physics)
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
11 Dip Coater
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
12 Drying Oven_7.1 Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
13 FTIR Spectrometer (Spectrum 65)
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabNot Working
14 Fume Hood 4
(Open access)
Pankajkumar Gound
7.1 LabWorking
15 Hot plate with stirrer (1)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
16 Hot plate with stirrer (2)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
17 Hot plate with stirrer (3)_2 arm glove box
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
18 Hot plate with stirrer (4)_4-arm glove box
(Open access)
Pankajkumar Gound
7.1 LabWorking
19 Hydrothermal Reactor_Fume Hood 2
(Controlled access)
7.1 LabWorking
20 Leica Microscope
(Open access)
Anjum Ahmed (NH)
7.1 LabWorking
21 pH Meter
(Open access)
Pankajkumar Gound
7.1 LabWorking
22 Schlenk Line (1)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
23 Schlenk Line (2)_Fume Hood 3
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
24 SILAR controller
(Open access)
Pankajkumar Gound
7.1 LabWorking
25 Spin Coater_4 arm glove box
(Open access)
Pankajkumar Gound
7.1 LabWorking
26 Thermogravimetric Analyzer
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
27 Tube Furnace_Fume hood 5
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
28 Ultrasonicator_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
29 UV-Ozone Cleaner_7.1 Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
30 UV-Vis-Spectrometer - Lambda 25 (7.1 Lab)
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
31 Wafer bonder
(Open access)
Dipankar Saha7.1 LabPartially Working

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)
LIC : Deepti Rukade(NH), Pankaj Upadhyay
System NameSystem OwnerFaculty in-chargeLocationStatus
32 Temperature Dependent Spectral Response Measurement system - PL set up
(Controlled access)
ankit udai
Pratim Saha
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working
33 Transient Absorption Pump Probe Spectrometer
(Controlled access)
Pratim Saha
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)
LIC : Bazila (H) Parvez, Deepti Rukade(NH), Jaya Jha, Mahalaxmi Patil
System NameSystem OwnerFaculty in-chargeLocationStatus
34 Magnetoresistance Setup
(Open access)
Ambika Shanker Shukla
Ashwin TulapurkarApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Working
35 RF Cryogenic Device Characterization system
(Controlled access)
Bazila (H) Parvez
Dipankar SahaApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
LIC : Deepti Rukade(NH), Kanchan Singh Rana, Kulasekaran Muniappan, Navneet Kumar Thakur [H]
System NameSystem OwnerFaculty in-chargeLocationStatus
36 FPA (Focal Plane Array) Characterization set up
(Open access)
Kulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
37 Hall Measurement System
(Open access)
Kulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
38 Spectral Response-single pixel characterisation
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
39 Wire Bonder_Hybond
(Open access)
Kulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working

Bio Sensors Lab (NanoE bldg, 7th floor)
LIC : Deepti Rukade(NH), Madhuri Vinchurkar, Rajul Patkar
System NameSystem OwnerFaculty in-chargeLocationStatus
40 Contact Angle Instrument (GBX)
(Open access)
Pankajkumar Gound
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Working
41 Eppendorf FemtoJet 4x Microinjector
(Open access)
Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working
42 Fluorescence Microscope (Z1)
(Controlled access)
Pankajkumar Gound
Kasturi SahaBio Sensors Lab (NanoE bldg, 7th floor)Working
43 FTIR
(Open access)
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Working
44 Laser Engraving System (LES)
(Open access)
Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working
45 Owlstone Vapour Generator (OVG-4)
(Open access)
Pankajkumar Gound
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Working
46 Potentiostat
(Open access)
Pankajkumar Gound
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Working
47 UV-Vis-NIR Spectrometer - Lambda 750
(Controlled access)
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Working

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)
LIC : Deepti Rukade(NH), Paritosh Meihar
System NameSystem OwnerFaculty in-chargeLocationStatus
48 Aries(Temperature Dependent IV/CV)
(Open access)
Paritosh Meihar
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
49 Cryogenic probe station
(Controlled access)
Himani Jawa
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
50 Polaris (Stress/Long Time Measurements)
(Open access)
Paritosh Meihar
Jayatika (H) Sakhuja
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
51 Proxima (Fast IV Measurement/ B1500)
(Open access)
Paritosh Meihar
Anil KottantharayilDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
52 RIGEL (Keysight B1500)
(Open access)
Paritosh Meihar
Jayatika (H) Sakhuja
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
53 Sirius (NBTI Setup)
(Open access)
Paritosh Meihar
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working

EC Lab
LIC : Deepti Rukade(NH), Madhuri Mishra, Minita Surwade (NH)
System NameSystem OwnerFaculty in-chargeLocationStatus
54 Cross section TEM sample preparation unit - Dimpler
(Controlled access)
Minita Surwade (NH)
Anil KottantharayilEC LabWorking
55 Cross section TEM sample preparation unit - Disc Cutter
(Controlled access)
Minita Surwade (NH)
Anil KottantharayilEC LabWorking
56 Cross section TEM sample preparation unit - PIPS
(Controlled access)
Minita Surwade (NH)
Anil KottantharayilEC LabWorking
57 Cross section TEM sample preparation unit - Ultrasonic Cutter
(Controlled access)
Minita Surwade (NH)
Anil KottantharayilEC LabWorking
58 EC Lab Hot air Oven
(Open access)
Minita Surwade (NH)
Ashwin TulapurkarEC LabWorking
59 Electroplating system - Au/Ni/Cu
(Open access)
Minita Surwade (NH)
Dipankar SahaEC LabWorking
60 General Purpose Wet Bench (EC Lab)
(Open access)
Minita Surwade (NH)
Anil KottantharayilEC LabWorking
61 Logitech PM5 Precision Lapping and Polishing Machine
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiEC LabWorking
62 Logitech WSB2 Wafer Substrate Bonding Unit
(Open access)
Kulasekaran Muniappan
Subhananda ChakrabartiEC LabWorking
63 PLD target making furnace
(Open access)
Madhuri Mishra
Minita Surwade (NH)
Subhananda ChakrabartiEC LabWorking
64 Spinner 2 Inch (PDMS)
(Open access)
Minita Surwade (NH)
Dipankar SahaEC LabWorking
65 Vapor generator for explosive detection
(Open access)
V Ramgopal RaoEC LabWorking

MBE Clean Room 1 (NanoE bldg, Gr floor)
LIC : Deepti Rukade(NH), Jay Agawane, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
66 Molecular Beam Epitaxy III Nitrides
(Controlled access)
Robin Dahiya (H)
Soumyadip Chatterjee (H)
Apurba LahaMBE Clean Room 1 (NanoE bldg, Gr floor)Working
67 Molecular Beam Epitaxy III-V
(Controlled access)
Subhananda ChakrabartiMBE Clean Room 1 (NanoE bldg, Gr floor)Working
68 Molecular Beam Epitaxy Si, Ge, Sn
(Controlled access)
Dhammapriy Gayakwad
Alisha Nanwani
Suddhasatta MahapatraMBE Clean Room 1 (NanoE bldg, Gr floor)Working

MBE Clean Room 2 (NanoE bldg, Gr floor)
LIC : Deepti Rukade(NH), Jay Agawane, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
69 6 Target E Beam Evaporator
(Controlled access)
Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
70 Dicer
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
71 Flip Chip Bonder
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
72 In Thermal Evaporator
(Controlled access)
Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working

Micro1 Lab
LIC : Deepti Rukade(NH), Hemlata Tiwari (NH), Minita Surwade (NH), Ravindra Singh Pokharia
System NameSystem OwnerFaculty in-chargeLocationStatus
73 2 inch Boron_Solid source Diffusion Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
74 2 inch CMOS specific FGA furnace
(Open access)
Anil KottantharayilMicro1 LabWorking
75 2 inch Dry oxidation Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
76 2 inch General purpose Forming gas(FGA)/ Ar /N2 annealing furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
77 2 inch N2 Annealing Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
78 2 inch Phosphorous_Solid source Diffusion Furnace
(Open access)
Anil KottantharayilMicro1 LabPartially Working
79 2 inch Wet oxidation Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
80 4 target E-beam evaporator
(Open access)
Minita Surwade (NH)
Apurba LahaMicro1 LabPartially Working
81 Dielectric - sputter System
(Open access)
Minita Surwade (NH)
Madhuri Mishra
Ashwin TulapurkarMicro1 LabPartially Working
82 Gold Electroplating System
(Open access)
Bhanu B Upadhyay [NH]
Dipankar SahaMicro1 LabWorking
83 HRXRD
(Controlled access)
Anjum Ahmed (NH)
Swagata Bhunia
Apurba LahaMicro1 LabWorking
84 Thermal Evaporator - Al
(Open access)
Shilpa Kharat
Minita Surwade (NH)
Anil KottantharayilMicro1 LabWorking
85 Thermal Evaporator-Cr/Au
(Open access)
Shilpa Kharat
Minita Surwade (NH)
Saurabh LodhaMicro1 LabNot Working
86 Tube Washer
(Open access)
Minita Surwade (NH)
Anil KottantharayilMicro1 LabWorking

Micro1 Yellow Room
LIC : Akshata(NH) Bhosle, Deepti Rukade(NH), Mayur Pawar, Ravindra Singh Pokharia
System NameSystem OwnerFaculty in-chargeLocationStatus
87 Barn-stead Lab-line Oven
(Open access)
V Ramgopal RaoMicro1 Yellow RoomWorking
88 Karl Suss MJB4 Mask Aligner
(Open access)
Hemant Kshirsagar
Akshata(NH) Bhosle
Avradeep PalMicro1 Yellow RoomNot Working
89 Laser Writer
(Open access)
Akshata(NH) Bhosle
Nikhil (NH) Palkar
Kasturi SahaMicro1 Yellow RoomPartially Working
90 Multi-pocket Electron-beam Evaporator (4 target - GaN)
(Controlled access)
Mahalaxmi Patil
Sreenadh (H) Surapaneni
Dipankar SahaMicro1 Yellow RoomWorking
91 Probe Sonicator
(Open access)
Saurabh LodhaMicro1 Yellow RoomWorking
92 Spinner 2 inch (General Purpose)
(Open access)
Hemant Kshirsagar
Akshata(NH) Bhosle
Saurabh LodhaMicro1 Yellow RoomWorking
93 Spinner 2 inch (SU8, PPR)
(Open access)
Hemant Kshirsagar
Akshata(NH) Bhosle
Saurabh LodhaMicro1 Yellow RoomWorking
94 STSRIE
(Open access)
Rowtu Srinu (H)
Suddhasatta MahapatraMicro1 Yellow RoomWorking

Micro2 Lab
LIC : Anjum Ahmed (NH), Deepti Rukade(NH), Madhuri Mishra
System NameSystem OwnerFaculty in-chargeLocationStatus
95 4 probe Measurement (Automatic)
(Open access)
Ambika Shanker Shukla
Anjum Ahmed (NH)
Saurabh LodhaMicro2 LabWorking
96 4 Probe Measurement (Manual)
(Open access)
Anjum Ahmed (NH)
Saurabh LodhaMicro2 LabWorking
97 DektakXT Profilometer
(Controlled access)
Anjum Ahmed (NH)
Shilpa Kharat
Saurabh LodhaMicro2 LabWorking
98 Filmetrics Reflectometer
(Open access)
Anjum Ahmed (NH)
Poonam (NH) Katkar
Udayan GangulyMicro2 LabWorking
99 Hot wire CVD(HWCVD)
(Open access)
Anjum Ahmed (NH)
Anil KottantharayilMicro2 LabWorking
100 Organic Evaporation System
(Open access)
Anjum Ahmed (NH)
Dinesh KabraMicro2 LabWorking
101 Photoluminescence Measurement set up (PL Set up)
(Controlled access)
Kulasekaran Muniappan
Raveesh Gourishetty
Subhananda ChakrabartiMicro2 LabPartially Working
102 Plasma Immersion Ion Implantation (PIII)
(Open access)
Anjum Ahmed (NH)
Saurabh LodhaMicro2 LabWorking
103 X-ray Photoelectron Spectroscopy
(Controlled access)
Anjum Ahmed (NH)
Jayeeta Sen (NH)
Saurabh LodhaMicro2 LabNot Working

Nano Lab
LIC : Anjum Ahmed (NH), Deepti Rukade(NH), Hemant Kshirsagar, Rowtu Srinu (H)
System NameSystem OwnerFaculty in-chargeLocationStatus
104 ALD
(Open access)
Anjum Ahmed (NH)
Saurabh LodhaNano LabWorking
105 ALD LL
(Controlled access)
Anjum Ahmed (NH)
Saurabh LodhaNano LabWorking
106 Inductively coupled plasma CVD (ICPCVD)
(Open access)
Pradeep Nyaupane
Hemant Kshirsagar
Dipankar SahaNano LabNot Working
107 Nano Wet Bench
(Open access)
Deepti Rukade(NH)
Saurabh LodhaNano LabWorking
108 Olympus Microscope_Nano Lab
(Open access)
Anjum Ahmed (NH)
Deepti Rukade(NH)
Dipankar SahaNano LabWorking
109 Rapid Thermal Processing(RTP)
(Open access)
Bhanu B Upadhyay [NH]
Arpit Sahu
Dipankar SahaNano LabWorking
110 Sentech Ellipsometer
(Open access)
Nikhil (NH) Palkar
Deepti Rukade(NH)
Anil KottantharayilNano LabWorking
111 Sputter (ATC 2200)
(Open access)
Paritosh Meihar
Udayan GangulyNano LabPartially Working
112 Sputter (Orion)
(Controlled access)
Ambika Shanker Shukla
Akanksha Chouhan
Ashwin TulapurkarNano LabNot Working
113 Ultech Furnace Anneal
(Open access)
Anil KottantharayilNano LabWorking

Nano Litho Lab
LIC : Akshata(NH) Bhosle, Deepti Rukade(NH), Hemant Kshirsagar, Himani Jawa, Rowtu Srinu (H)
System NameSystem OwnerFaculty in-chargeLocationStatus
114 Double Sided Aligner (DSA)
(Open access)
Hemant Kshirsagar
Akshata(NH) Bhosle
Dipankar SahaNano Litho LabPartially Working
115 RaithEBL_Long
(Open access)
Anuj Bathla (H)
Abhay Anand V S
Suddhasatta MahapatraNano Litho LabWorking
116 RaithEBL_Short
(Open access)
Abhay Anand V S
Anuj Bathla (H)
Suddhasatta MahapatraNano Litho LabWorking
117 Spinner 2 inch (PPR)
(Open access)
Hemant Kshirsagar
Akshata(NH) Bhosle
Dipankar SahaNano Litho LabWorking
118 Spinner 4 inch (PMMA)
(Open access)
Akshata(NH) Bhosle
Hemant Kshirsagar
Dipankar SahaNano Litho LabPartially Working
119 Spinner 8 inch (General Purpose)
(Open access)
Hemant Kshirsagar
Akshata(NH) Bhosle
Dipankar SahaNano Litho LabWorking
120 Torrey Pines Scientific Hi-temp Hotplate
(Open access)
Akshata(NH) Bhosle
Nano Litho LabNot Working
121 Torrey Pines Scientific Low-temp Hotplate
(Open access)
Akshata(NH) Bhosle
Nano Litho LabNot Working

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
LIC : Anjum Ahmed (NH), Deepti Rukade(NH), Mayur Pawar, Nama Premsai
System NameSystem OwnerFaculty in-chargeLocationStatus
122 1.2 Lab wet bench
(Open access)
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
123 AJA 6 Target E beam Evaporator
(Controlled access)
Nama Premsai
Anjum Ahmed (NH)
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
124 Ambios XP-2 Profilometer
(Open access)
Anjum Ahmed (NH)
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
125 Ar-ion Milling
(Open access)
Ambika Shanker Shukla
Rachit Pandey (H)
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
126 ICPRIE (New)
(Controlled access)
Bhanu B Upadhyay [NH]
Yogendra Yadav (NH)
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Partially Working
127 ICPRIE (old)
(Open access)
Bhanu B Upadhyay [NH]
NETAJI SUVACHINTAK
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
128 Plasma asher
(Open access)
Anuj Kumar Singh
Shilpa Kharat
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
129 Plasma Doping System
(Open access)
Rowtu Srinu (H)
Udayan GangulyNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
130 PLD I
(Controlled access)
Santosh Kumar Yadav
Sana Ayyuby
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
131 PLD II
(Open access)
Ambika Shanker Shukla
Pralay Paul
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
132 PLD III
(Controlled access)
Santosh Kumar Yadav
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
133 PLD IV
(Open access)
Santosh Kumar Yadav
Bhabani Prasad Sahu
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working

NMPF Lab
LIC : Anjum Ahmed (NH), Deepti Rukade(NH), Hemant Kshirsagar
System NameSystem OwnerFaculty in-chargeLocationStatus
134 Deep Reactive Ion Etching – Samco
(Controlled access)
Hemant Kshirsagar
Anjum Ahmed (NH)
Suddhasatta MahapatraNMPF LabWorking
135 Double Side Mask Aligner – Suss Microtech
(Open access)
Anjum Ahmed (NH)
Hemant Kshirsagar
Dipankar SahaNMPF LabWorking
136 LPCVD Furnace_PolySi, Doped PolySi
(Controlled access)
Anjum Ahmed (NH)
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
137 LPCVD Furnace_SixNy
(Controlled access)
Anjum Ahmed (NH)
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
138 LPCVD Furnace_Thermal oxidation
(Controlled access)
Anjum Ahmed (NH)
Hemant Kshirsagar
Anil KottantharayilNMPF LabWorking
139 Multi target sputter – AJA International
(Controlled access)
Hemant Kshirsagar
Anjum Ahmed (NH)
Ashwin TulapurkarNMPF LabWorking
140 Parylene CVD – SCS
(Controlled access)
Anjum Ahmed (NH)
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
141 Rapid Thermal Annealing – Annealsys
(Controlled access)
Hemant Kshirsagar
Anjum Ahmed (NH)
Saurabh LodhaNMPF LabWorking
142 RIE-1C Plasma Etcher– Samco
(Controlled access)
Hemant Kshirsagar
Anjum Ahmed (NH)
Suddhasatta MahapatraNMPF LabWorking
143 Spin Coater – Laurell
(Open access)
Hemant Kshirsagar
Akshata(NH) Bhosle
Dipankar SahaNMPF LabWorking
144 Wafer Dicer – ADT
(Controlled access)
Hemant Kshirsagar
Anjum Ahmed (NH)
Ashwin TulapurkarNMPF LabWorking
145 Wet bench_2” RCA , Piranha
(Open access)
Hemant Kshirsagar
Anjum Ahmed (NH)
Saurabh LodhaNMPF LabWorking
146 Wet bench_Metal etching
(Open access)
Anjum Ahmed (NH)
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
147 Wet bench_Solvents
(Open access)
Anjum Ahmed (NH)
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
148 Wire Bonder (TPT HB16)_Aluminium
(Controlled access)
Anjum Ahmed (NH)
Pankajkumar Gound
Saurabh LodhaNMPF LabWorking

PPMS Lab
LIC : Ambika Shanker Shukla, Deepti Rukade(NH)
System NameSystem OwnerFaculty in-chargeLocationStatus
149 PPMS - Integrated cryogen-free system
(Controlled access)
Ambika Shanker Shukla
Deepak Kumar
Ashwin TulapurkarPPMS LabWorking

Spectroscopy Lab
LIC :
System NameSystem OwnerFaculty in-chargeLocationStatus
150 MFP-3D-AFM
(Controlled access)
Navneet (NH) Bhardwaj
NETAJI SUVACHINTAK
Dipankar SahaSpectroscopy LabPartially Working

Spintronics Lab
LIC : Ambika Shanker Shukla, Deepti Rukade(NH)
System NameSystem OwnerFaculty in-chargeLocationStatus
151 Magneto Optic Kerr Effect (MOKE)
(Controlled access)
Rachit Pandey (H)
Akanksha Chouhan
Ashwin TulapurkarSpintronics LabWorking
152 Magnetoresistance Setup with Vector Network Anlyser (VNA) and Rotating stage
(Controlled access)
Ambika Shanker Shukla
Ashwin TulapurkarSpintronics LabWorking

Wet Chemistry lab
LIC : Deepti Rukade(NH), Madhuri Mishra, Minita Surwade (NH), Shilpa Kharat
System NameSystem OwnerFaculty in-chargeLocationStatus
153 2 inch RCA Clean Station
(Open access)
Minita Surwade (NH)
Pankajkumar Gound
Anil KottantharayilWet Chemistry labWorking
154 4 inch RCA Clean Station
(Open access)
Minita Surwade (NH)
Pankajkumar Gound
Saurabh LodhaWet Chemistry labWorking
155 General Purpose Wet Bench (Wet Chemistry Lab)
(Open access)
Minita Surwade (NH)
Saurabh LodhaWet Chemistry labWorking
156 Olympus Microscope_2_Wet Chemistry Lab
(Open access)
Pankajkumar Gound
Saurabh LodhaWet Chemistry labWorking
157 Piranha Cleaning
(Open access)
Minita Surwade (NH)
Shilpa Kharat
Anil KottantharayilWet Chemistry labWorking
158 Scientific India Microscope
(Open access)
Anjum Ahmed (NH)
Wet Chemistry labNot Working
159 TMAH wet etch station
(Open access)
Minita Surwade (NH)
Saurabh LodhaWet Chemistry labWorking



MarkerMeaning of marker
Not WorkingEquipment may not be used
Partially Working -- Equipment fully working but process not optimized
-- Some parts of equipment not working. Eg. Heater in Metal sputter not working
-- Not all processes that are possible in the tool are working
-- Equipment working in manual mode temporarily. Eg. RAITH sample loading is manual sometimes
Fully WorkingFully operational
Critical ToolCritical tools are widely used and their upkeep is of utmost priority. FICs should take the lead for driving the issues to make the tools UP on a high priority basis taking help from all teams (purchase, EMT, facility, process).


Definition of 'Controlled access' for Equipment in labs at IITBNF:


'Controlled access' is marked for certain tools to ensure that equipment is used on a priority basis for processing jobs which are part of Project deliverables and only after that they are made available for other users.

  • not open for training.
  • will be available for usage only through operators.
  • will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.