Equipment Status

7.1 Lab
LIC : Deepti Rukade, Minita Surwade, Pankajkumar Gound

	System Name	System Owner	Faculty in-charge	Location	Status
1	Atmospheric Furnace_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
2	Dip Coater_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
3	Drying Oven_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
4	Fume Hood 4	Pankajkumar Gound		7.1 Lab	Working
5	Hot plate with stirrer (1)_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
6	Hot plate with stirrer (2)_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
7	Hot plate with stirrer (3)_Fume Hood 3	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
8	Hot plate with stirrer (4)_Fume Hood 3	Pankajkumar Gound		7.1 Lab	Working
9	Hydrothermal Reactor_Fume Hood 2			7.1 Lab	Working
10	pH Meter	Mukul Singh Pankajkumar Gound		7.1 Lab	Working
11	Schlenk Line (2)_Fume Hood 3	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
12	SILAR controller_Fume Hood 1	Pankajkumar Gound		7.1 Lab	Working
13	Spin Coater_4 arm glove box	Pankajkumar Gound		7.1 Lab	Working
14	Thermogravimetric Analyzer	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
15	Tube Furnace_Fume hood 5	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
16	Ultrasonicator_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
17	UV-Ozone Cleaner_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
18	Contact Angle System (Data Physics)	Pankajkumar Gound Ankitha Bangera	Saurabh Lodha	7.1 Lab	Working
19	FTIR Spectrometer (Spectrum 65)	Pankajkumar Gound	Anil Kottantharayil	7.1 Lab	Working
20	Olympus Microscope_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
21	UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab)	Pankajkumar Gound	Anil Kottantharayil	7.1 Lab	Working
22	2-arm glove box (1)_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
23	2-arm glove box_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
24	4-arm glove box_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
25	Schlenk Line (1)_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Pankaj Upadhyay

	System Name	System Owner	Faculty in-charge	Location	Status
26	Temperature Dependent Spectral Response Measurement system - PL set up	Pratim Saha Tarni Aggarwal	Dipankar Saha	Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)	Working
27	Transient Absorption Pump Probe Spectrometer	Shonal Chouksey Vikas Pendem	Dipankar Saha	Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)	Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Mudassar Meer

	System Name	System Owner	Faculty in-charge	Location	Status
28	RF Cryogenic Device Characterization system	Mudassar Meer Jaya Jha	Dipankar Saha	Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)	Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Kulasekaran Muniappan

	System Name	System Owner	Faculty in-charge	Location	Status
29	FPA (Focal Plane Array) Characterization set up		Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working
30	Hall Measurement System	Debi Prasad Panda	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working
31	Spectral Response-single pixel characterisation		Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working

Bio Sensors Lab (NanoE bldg, 7th floor)
LIC : Deepti Rukade, Madhuri Vinchurkar, Rajul Patkar

	System Name	System Owner	Faculty in-charge	Location	Status
32	Nano Dispenser	Pankajkumar Gound	Soumyo Mukherji	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
33	Contact Angle Instrument (GBX)	Pankajkumar Gound Madhuri Vinchurkar	Saurabh Lodha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
34	Fluorescence Microscope (Z1)	Dilip Agarwal Madhuri Vinchurkar	Kasturi Saha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
35	FTIR	Kalyani Patrikar Pankajkumar Gound	Anil Kottantharayil	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
36	Potentiostat	Mukul Singh	Saurabh Lodha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
37	UV-Vis-NIR Spectrometer - Lambda 750	Ankitha Bangera Pankajkumar Gound	Anil Kottantharayil	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
38	Laser Engraving System (LES)	Pankajkumar Gound	Soumyo Mukherji	Bio Sensors Lab (NanoE bldg, 7th floor)	Working

BioMEMS Lab (Micro - 2)
LIC : Anjum Ahmed, Deepti Rukade

	System Name	System Owner	Faculty in-charge	Location	Status
39	Oven	Anjum Ahmed		BioMEMS Lab (Micro - 2)	Not Working

Char Lab-2
LIC : Deepti Rukade, Sharanya Sasidharan

	System Name	System Owner	Faculty in-charge	Location	Status
40	MFP-3D-AFM	Tarni Aggarwal Navneet Bhardwaj	Dipankar Saha	Char Lab-2	Working
41	PPMS - Integrated cryogen-free system	Pratim Saha Ambika Shanker Shukla	Dipankar Saha	Char Lab-2	Working
42	Owlstone Vapour Generator (OVG-4)	Ashwini Gajarushi	Saurabh Lodha	Char Lab-2	Working
43	Wire Bonder	Kulasekaran Muniappan	Suddhasatta Mahapatra	Char Lab-2	Not Working

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)
LIC : Deepti Rukade, Sadaf Parwaiz, THIRUNAVUKKARASU A

	System Name	System Owner	Faculty in-charge	Location	Status
44	Aries(Temperature Dependent IV/CV)	Charu Saini THIRUNAVUKKARASU A	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
45	Cryogenic probe station	Himani Jawa	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
46	Cygnus(Organic Device Characterization)	Charu Saini	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Not Working
47	Phoenix (Temperature Dependent IV/CV)	Charu Saini THIRUNAVUKKARASU A	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Not Working
48	Polaris (Stress/Long Time Measurements)	Sandip Lashkare THIRUNAVUKKARASU A	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
49	Proxima (Fast IV Measurement/ B1500)	THIRUNAVUKKARASU A Charu Saini	Anil Kottantharayil	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
50	RIGEL (Keysight B1500)	Sandip Lashkare	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
51	Sirius (NBTI Setup)	Charu Saini THIRUNAVUKKARASU A	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Not Working
52	Vega (Room Temperature IV/ CV)	Charu Saini THIRUNAVUKKARASU A	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Not Working

EC Lab
LIC : Deepti Rukade, Minita Surwade

	System Name	System Owner	Faculty in-charge	Location	Status
53	Electroplating system - Au/Ni/Cu	Minita Surwade	Dipankar Saha	EC Lab	Working
54	PLD target making furnace	Punam Murkute	Subhananda Chakrabarti	EC Lab	Working
55	General Purpose Wet Bench (EC Lab)	Punam Murkute Minita Surwade	Anil Kottantharayil	EC Lab	Working
56	TMAH wet etch station	Jawaid Alam Minita Surwade	Saurabh Lodha	EC Lab	Working
57	Cross section TEM sample preparation unit - Dimpler	Navneet Bhardwaj Minita Surwade	Anil Kottantharayil	EC Lab	Working
58	Cross section TEM sample preparation unit - Disc Cutter	Navneet Bhardwaj Minita Surwade	Anil Kottantharayil	EC Lab	Working
59	Cross section TEM sample preparation unit - PIPS	Navneet Bhardwaj Minita Surwade	Anil Kottantharayil	EC Lab	Working
60	Cross section TEM sample preparation unit - Ultrasonic Cutter	Navneet Bhardwaj Minita Surwade	Anil Kottantharayil	EC Lab	Working
61	EC Lab Hot air Oven	Punam Murkute Minita Surwade		EC Lab	Not Working
62	Logitech PM5 Precision Lapping and Polishing Machine	Sourabh Upadhyay	Subhananda Chakrabarti	EC Lab	Working
63	Logitech WSB2 Wafer Substrate Bonding Unit		Subhananda Chakrabarti	EC Lab	Working
64	Spinner 2 Inch (PDMS)	Minita Surwade	Dipankar Saha	EC Lab	Working
65	Vapor generator for explosive detection		V Ramgopal Rao	EC Lab	Working

MBE Clean Room 1 (NanoE bldg, Gr floor)
LIC : Debi Prasad Panda, Deepti Rukade, Kankat Ghosh

	System Name	System Owner	Faculty in-charge	Location	Status
66	Molecular Beam Epitaxy III Nitrides	Kankat Ghosh	Apurba Laha	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working
67	Molecular Beam Epitaxy III-V	Debi Prasad Panda	Subhananda Chakrabarti	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working
68	Molecular Beam Epitaxy Si, Ge, Sn	JASWANT RATHORE	Suddhasatta Mahapatra	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working

MBE Clean Room 2 (NanoE bldg, Gr floor)
LIC : Deepti Rukade, Kulasekaran Muniappan

	System Name	System Owner	Faculty in-charge	Location	Status
69	6 Target E Beam Evaporator	Goma Kumari KC	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
70	In Thermal Evaporator	Goma Kumari KC	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
71	Dicer	Kulasekaran Muniappan	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
72	Flip Chip Bonder	Kulasekaran Muniappan	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working

Micro1 Lab
LIC : Anjum Ahmed, Deepti Rukade, Minita Surwade

	System Name	System Owner	Faculty in-charge	Location	Status
73	2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace)	Pankajkumar Gound Amita Rawat	Anil Kottantharayil	Micro1 Lab	Working
74	2 inch Boron_Solid source Diffusion Furnace		Anil Kottantharayil	Micro1 Lab	Working
75	2 inch CMOS specific FGA furnace	Kalaivani Srinivasan	Anil Kottantharayil	Micro1 Lab	Working
76	2 inch Dry oxidation Furnace	Amita Rawat Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
77	2 inch N2 Annealing Furnace	Raja Sekhar Baddula	Anil Kottantharayil	Micro1 Lab	Working
78	2 inch Phosphorous_Solid source Diffusion Furnace	suren patwardhan	Anil Kottantharayil	Micro1 Lab	Partially Working
79	2 inch Wet oxidation Furnace	Amita Rawat Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
80	4 target E-beam evaporator	Nama Premsai	Apurba Laha	Micro1 Lab	Partially Working
81	Dielectric - sputter System	Amita Rawat	Ashwin Tulapurkar	Micro1 Lab	Partially Working
82	Thermal Evaporator - Al	Swasti Bhatia Minita Surwade	Anil Kottantharayil	Micro1 Lab	Working
83	Thermal Evaporator-Cr/Au	Anjum Ahmed Minita Surwade	Saurabh Lodha	Micro1 Lab	Working
84	HRXRD	Swagata Bhunia Kankat Ghosh	Apurba Laha	Micro1 Lab	Working
85	SEM EVO 18	Madhuri Mishra Sumit Saha	Suddhasatta Mahapatra	Micro1 Lab	Working
86	2 inch RCA Clean Station	Minita Surwade Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
87	4 inch RCA Clean Station	Minita Surwade Pankajkumar Gound	Saurabh Lodha	Micro1 Lab	Working
88	Chemical Mechanical Planarisation		Udayan Ganguly	Micro1 Lab	Working
89	General Purpose Wet Bench (Micro 1)	Minita Surwade	Saurabh Lodha	Micro1 Lab	Working
90	Tube Washer	Minita Surwade	Anil Kottantharayil	Micro1 Lab	Working

Micro1 Yellow Room
LIC : Deepti Rukade, Hitesh Kamble

	System Name	System Owner	Faculty in-charge	Location	Status
91	Multi-pocket Electron-beam Evaporator (4 target - GaN)	Yogendra Yadav Mudassar Meer	Dipankar Saha	Micro1 Yellow Room	Working
92	STSRIE	Amita Rawat Rowtu Srinu	Suddhasatta Mahapatra	Micro1 Yellow Room	Working
93	Karl Suss MJB4 Mask Aligner	Hitesh Kamble Hemant Kshirsagar	Apurba Laha	Micro1 Yellow Room	Working
94	Laser Writer	Hitesh Kamble Madhuri Mishra	Kasturi Saha	Micro1 Yellow Room	Working
95	Spinner 2 inch (General Purpose)	Hitesh Kamble	Saurabh Lodha	Micro1 Yellow Room	Working
96	Spinner 2 inch (SU8, PPR)	Hitesh Kamble Hemant Kshirsagar	Saurabh Lodha	Micro1 Yellow Room	Working
97	Barn-stead Lab-line Oven	Hitesh Kamble	V Ramgopal Rao	Micro1 Yellow Room	Working
98	Probe Sonicator	Hitesh Kamble	Saurabh Lodha	Micro1 Yellow Room	Working

Micro2 Lab
LIC : Anjum Ahmed, Deepti Rukade

	System Name	System Owner	Faculty in-charge	Location	Status
99	Hot wire CVD(HWCVD)	Anjum Ahmed	Anil Kottantharayil	Micro2 Lab	Working
100	Organic Evaporation System	Kalyani Patrikar Anjum Ahmed	Dinesh Kabra	Micro2 Lab	Working
101	4 probe Measurement (Automatic)	Ambika Shanker Shukla Anjum Ahmed	Saurabh Lodha	Micro2 Lab	Working
102	4 Probe Measurement (Manual)	Anjum Ahmed	Saurabh Lodha	Micro2 Lab	Working
103	DektakXT Profilometer	Anjum Ahmed	Saurabh Lodha	Micro2 Lab	Working
104	Filmetrics Reflectometer	Anjum Ahmed	Udayan Ganguly	Micro2 Lab	Working
105	Leica Microscope	Anjum Ahmed		Micro2 Lab	Working
106	Photoluminescence Measurement set up (PL Set up)	Punam Murkute	Subhananda Chakrabarti	Micro2 Lab	Partially Working
107	X-ray Photoelectron Spectroscopy	Anjum Ahmed Jayeeta Biswas (Sen)	Saurabh Lodha	Micro2 Lab	Working
108	Plasma Immersion Ion Implantation (PIII)	Jayeeta Biswas (Sen) Anjum Ahmed	Saurabh Lodha	Micro2 Lab	Working

Nano Lab
LIC : Deepti Rukade, Gayatri Vaidya, Pijush Chakraborty

	System Name	System Owner	Faculty in-charge	Location	Status
109	ALD	Jayeeta Biswas (Sen)	Saurabh Lodha	Nano Lab	Working
110	ALD LL	Jayeeta Biswas (Sen)	Saurabh Lodha	Nano Lab	Working
111	Inductively coupled plasma CVD (ICPCVD)	Hitesh Kamble	Dipankar Saha	Nano Lab	Working
112	Rapid Thermal Processing(RTP)	Akhil Kumar S Hitesh Kamble	Dipankar Saha	Nano Lab	Working
113	Sputter (ATC 2200)	Pijush Chakraborty Amita Rawat	Udayan Ganguly	Nano Lab	Working
114	Sputter (Orion)	Ambika Shanker Shukla Pijush Chakraborty	Ashwin Tulapurkar	Nano Lab	Working
115	Ultech Furnace Anneal		Anil Kottantharayil	Nano Lab	Working
116	Olympus Microscope		Dipankar Saha	Nano Lab	Working
117	Sentech Ellipsometer	Nama Premsai	Anil Kottantharayil	Nano Lab	Working
118	Nano Wet Bench	Pijush Chakraborty Hitesh Kamble	Saurabh Lodha	Nano Lab	Working

Nano Litho Lab
LIC : Deepti Rukade, Gayatri Vaidya, Hitesh Kamble

	System Name	System Owner	Faculty in-charge	Location	Status
119	Double Sided Aligner (DSA)	Yogendra Yadav Hitesh Kamble	Dipankar Saha	Nano Litho Lab	Working
120	RaithEBL_Long	Shalini Shrivastava Kartikey Thakar	Suddhasatta Mahapatra	Nano Litho Lab	Working
121	RaithEBL_Short	Kartikey Thakar Navneet Bhardwaj	Suddhasatta Mahapatra	Nano Litho Lab	Working
122	RaithSEM	Navneet Bhardwaj Shalini Shrivastava	Suddhasatta Mahapatra	Nano Litho Lab	Working
123	Spinner 4 inch (PMMA)	Hitesh Kamble	Dipankar Saha	Nano Litho Lab	Working
124	Spinner 8 inch (General Purpose)	Hitesh Kamble	Dipankar Saha	Nano Litho Lab	Working
125	Spinner 8 inch (PPR)	Hitesh Kamble	Dipankar Saha	Nano Litho Lab	Not Working
126	Torrey Pines Scientific Hi-temp Hotplate	Hitesh Kamble		Nano Litho Lab	Working
127	Torrey Pines Scientific Low-temp Hotplate	Hitesh Kamble		Nano Litho Lab	Working
128	Wafer bonder		Dipankar Saha	Nano Litho Lab	Partially Working

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
LIC : Deepti Rukade, Pijush Chakraborty, Sharanya Sasidharan

	System Name	System Owner	Faculty in-charge	Location	Status
129	AJA 6 Target E beam Evaporator	Nama Premsai	Apurba Laha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
130	Graphene specific Argon annealing system	Poonam Jangid Robin Singla	Anil Kottantharayil	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
131	PLD I	SENTHILKUMAR R	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
132	PLD II	Ambika Shanker Shukla	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
133	PLD III	SENTHILKUMAR R	Apurba Laha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
134	PLD IV	Pijush Chakraborty	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Not Working
135	Ambios XP-2 Profilometer	Anjum Ahmed Pijush Chakraborty	Suddhasatta Mahapatra	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
136	Ar-ion Milling	Ambika Shanker Shukla	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
137	ICPRIE (New)	Bhanu B Upadhyay Yogendra Yadav	Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Partially Working
138	ICPRIE (old)	Bhanu B Upadhyay Yogendra Yadav	Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
139	Plasma asher	Minita Surwade	Suddhasatta Mahapatra	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Partially Working
140	1.2 Lab wet bench		Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working

Status Symbol	Meaning of Status Symbol
Not Working	Equipment may not be used
Partially Working	Equipment working with some minor problem^****
Fully Working	Fully operational

^****

Equipment fully working but process not optimized
Some parts of equipment not working
Ex:-Heater in Metal sputter not working
Some process working, other not
Equipment working in manual mode.
Ex:-RAITH sample loading is manual sometimes

Definition of 'Controlled access' for Equipment in labs at IITBNF:

not open for training.
will be available for usage only through operators.
will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.

This is to ensure that these critical equipment are used on a priority basis for processing jobs which are part of Project deliverables and then made available to other users.

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Equipment Status