Equipment Status

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7.1 Lab
LIC : Deepti Rukade, Pankajkumar Gound
System NameSystem OwnerFaculty in-chargeLocationStatus
1 2 inch general purpose annealing furnace_Fume hood 3
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabNot Working
2 Atmospheric Furnace_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
3 Dip Coater
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
4 Drying Oven_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
5 Fume Hood 4
(Open access)
Pankajkumar Gound
7.1 LabNot Working
6 Hot plate with stirrer (1)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
7 Hot plate with stirrer (2)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
8 Hot plate with stirrer (3)_2 arm glove box
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
9 Hot plate with stirrer (4)_4-arm glove box
(Open access)
Pankajkumar Gound
7.1 LabNot Working
10 Hydrothermal Reactor_Fume Hood 2
(Controlled access)
7.1 LabNot Working
11 pH Meter
(Open access)
Pankajkumar Gound
7.1 LabNot Working
12 Schlenk Line (2)_Fume Hood 3
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
13 SILAR controller
(Open access)
Pankajkumar Gound
7.1 LabNot Working
14 Spin Coater_4 arm glove box
(Open access)
Pankajkumar Gound
7.1 LabNot Working
15 Thermogravimetric Analyzer
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
16 Tube Furnace_Fume hood 5
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
17 Contact Angle System (Data Physics)
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
18 FTIR Spectrometer (Spectrum 65)
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabNot Working
19 Olympus Microscope_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
20 UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab)
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabNot Working
21 2-arm glove box_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
22 4-arm glove box_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
23 Chemical Mechanical Planarisation
(Controlled access)
Udayan Ganguly7.1 LabNot Working
24 Schlenk Line (1)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
25 Owlstone Vapour Generator (OVG-4)
(Open access)
Saurabh Lodha7.1 LabNot Working
26 Ultrasonicator_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
27 UV-Ozone Cleaner_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabNot Working
28 Wafer bonder
(Open access)
Dipankar Saha7.1 LabNot Working
29 Wire Bonder
(Open access)
Kulasekaran Muniappan
Suddhasatta Mahapatra7.1 LabNot Working

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Pankaj Upadhyay
System NameSystem OwnerFaculty in-chargeLocationStatus
30 Temperature Dependent Spectral Response Measurement system - PL set up
(Controlled access)
Pankaj Upadhyay
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working
31 Transient Absorption Pump Probe Spectrometer
(Controlled access)
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Jaya Jha
System NameSystem OwnerFaculty in-chargeLocationStatus
32 Magnetoresistance Setup
(Open access)
Ambika Shanker Shukla
Ashwin TulapurkarApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Working
33 RF Cryogenic Device Characterization system
(Controlled access)
Jaya Jha
Dipankar SahaApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Not Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Kulasekaran Muniappan
System NameSystem OwnerFaculty in-chargeLocationStatus
34 FPA (Focal Plane Array) Characterization set up
(Open access)
Kulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
35 Hall Measurement System
(Open access)
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Not Working
36 Spectral Response-single pixel characterisation
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working

Bio Sensors Lab (NanoE bldg, 7th floor)
LIC : Deepti Rukade, Madhuri Vinchurkar, Rajul Patkar
System NameSystem OwnerFaculty in-chargeLocationStatus
37 Eppendorf FemtoJet 4x Microinjector
(Open access)
Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Not Working
38 Potentiostat
(Open access)
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Not Working
39 Contact Angle Instrument (GBX)
(Open access)
Pankajkumar Gound
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Not Working
40 Fluorescence Microscope (Z1)
(Controlled access)
Kasturi SahaBio Sensors Lab (NanoE bldg, 7th floor)Not Working
41 FTIR
(Open access)
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Not Working
42 UV-Vis-NIR Spectrometer - Lambda 750
(Controlled access)
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Not Working
43 Laser Engraving System (LES)
(Open access)
Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Not Working

Char Lab-2
LIC : Deepti Rukade, Nitin Patil
System NameSystem OwnerFaculty in-chargeLocationStatus
44 microPL
(Controlled access)
Sayantan Ghosh
Kartikey Thakar
Saurabh LodhaChar Lab-2Not Working
45 PPMS - Integrated cryogen-free system
(Controlled access)
Ambika Shanker Shukla
Ashwin TulapurkarChar Lab-2Not Working

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)
LIC : Charu Saini, Deepti Rukade, Yaswanth Chebrolu
System NameSystem OwnerFaculty in-chargeLocationStatus
46 Aries(Temperature Dependent IV/CV)
(Open access)
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
47 Cryogenic probe station
(Controlled access)
Himani Jawa
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
48 Cygnus(Organic Device Characterization)
(Open access)
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
49 Phoenix (Temperature Dependent IV/CV)
(Open access)
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
50 Polaris (Stress/Long Time Measurements)
(Open access)
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
51 Proxima (Fast IV Measurement/ B1500)
(Open access)
Yaswanth Chebrolu
Anil KottantharayilDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
52 RIGEL (Keysight B1500)
(Open access)
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
53 Sirius (NBTI Setup)
(Open access)
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
54 Vega (Room Temperature IV/ CV)
(Open access)
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working

EC Lab
LIC : Deepti Rukade, Minita Surwade
System NameSystem OwnerFaculty in-chargeLocationStatus
55 Electroplating system - Au/Ni/Cu
(Open access)
Minita Surwade
Dipankar SahaEC LabNot Working
56 PLD target making furnace
(Open access)
Subhananda ChakrabartiEC LabNot Working
57 General Purpose Wet Bench (EC Lab)
(Open access)
Minita Surwade
Anil KottantharayilEC LabNot Working
58 Cross section TEM sample preparation unit - Dimpler
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabNot Working
59 Cross section TEM sample preparation unit - Disc Cutter
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabNot Working
60 Cross section TEM sample preparation unit - PIPS
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabNot Working
61 Cross section TEM sample preparation unit - Ultrasonic Cutter
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabNot Working
62 EC Lab Hot air Oven
(Open access)
Minita Surwade
Ashwin TulapurkarEC LabNot Working
63 Logitech PM5 Precision Lapping and Polishing Machine
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiEC LabNot Working
64 Logitech WSB2 Wafer Substrate Bonding Unit
(Open access)
Kulasekaran Muniappan
Subhananda ChakrabartiEC LabNot Working
65 Spinner 2 Inch (PDMS)
(Open access)
Minita Surwade
Dipankar SahaEC LabNot Working
66 Vapor generator for explosive detection
(Open access)
V Ramgopal RaoEC LabNot Working

MBE Clean Room 1 (NanoE bldg, Gr floor)
LIC : Deepti Rukade, Jay Agawane, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
67 Molecular Beam Epitaxy III Nitrides
(Controlled access)
Apurba LahaMBE Clean Room 1 (NanoE bldg, Gr floor)Working
68 Molecular Beam Epitaxy III-V
(Controlled access)
Debi Prasad Panda
Subhananda ChakrabartiMBE Clean Room 1 (NanoE bldg, Gr floor)Working
69 Molecular Beam Epitaxy Si, Ge, Sn
(Controlled access)
Suddhasatta MahapatraMBE Clean Room 1 (NanoE bldg, Gr floor)Working

MBE Clean Room 2 (NanoE bldg, Gr floor)
LIC : Deepti Rukade, Jay Agawane, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
70 6 Target E Beam Evaporator
(Controlled access)
Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
71 In Thermal Evaporator
(Controlled access)
Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
72 Dicer
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
73 Flip Chip Bonder
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working

MCL Lab
LIC : Aniruddha Khade
System NameSystem OwnerFaculty in-chargeLocationStatus
74 MFP-3D-AFM
(Open access)
Tarni Aggarwal
Navneet Bhardwaj
Dipankar SahaMCL LabWorking

Micro1 Lab
LIC : Deepti Rukade, Hemlata Tiwari, Minita Surwade
System NameSystem OwnerFaculty in-chargeLocationStatus
75 2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace)
(Open access)
Pankajkumar Gound
Amita Rawat
Anil KottantharayilMicro1 LabNot Working
76 2 inch Boron_Solid source Diffusion Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabNot Working
77 2 inch CMOS specific FGA furnace
(Open access)
Anil KottantharayilMicro1 LabNot Working
78 2 inch Dry oxidation Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabNot Working
79 2 inch N2 Annealing Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabNot Working
80 2 inch Phosphorous_Solid source Diffusion Furnace
(Open access)
Anil KottantharayilMicro1 LabNot Working
81 2 inch Wet oxidation Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabNot Working
82 4 target E-beam evaporator
(Open access)
Minita Surwade
Apurba LahaMicro1 LabNot Working
83 Dielectric - sputter System
(Open access)
Ashwin TulapurkarMicro1 LabNot Working
84 Gold Electroplating System
(Open access)
Bhanu B Upadhyay
Micro1 LabNot Working
85 Thermal Evaporator - Al
(Open access)
Minita Surwade
Anil KottantharayilMicro1 LabNot Working
86 Thermal Evaporator-Cr/Au
(Open access)
Anjum Ahmed
Minita Surwade
Saurabh LodhaMicro1 LabNot Working
87 HRXRD
(Controlled access)
Anjum Ahmed
Swagata Bhunia
Apurba LahaMicro1 LabNot Working
88 SEM EVO 18
(Open access)
Suddhasatta MahapatraMicro1 LabNot Working
89 Tube Washer
(Open access)
Minita Surwade
Anil KottantharayilMicro1 LabNot Working

Micro1 Yellow Room
LIC : Akshata Bhosle, Deepti Rukade, Mayur Pawar
System NameSystem OwnerFaculty in-chargeLocationStatus
90 Multi-pocket Electron-beam Evaporator (4 target - GaN)
(Controlled access)
Yogendra Yadav
Dipankar SahaMicro1 Yellow RoomNot Working
91 STSRIE
(Open access)
Mayur Pawar
Suddhasatta MahapatraMicro1 Yellow RoomNot Working
92 Karl Suss MJB4 Mask Aligner
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Apurba LahaMicro1 Yellow RoomNot Working
93 Laser Writer
(Open access)
Pankaj Upadhyay
Akshata Bhosle
Kasturi SahaMicro1 Yellow RoomNot Working
94 Spinner 2 inch (General Purpose)
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Saurabh LodhaMicro1 Yellow RoomNot Working
95 Spinner 2 inch (SU8, PPR)
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Saurabh LodhaMicro1 Yellow RoomNot Working
96 Barn-stead Lab-line Oven
(Open access)
Mayur Pawar
V Ramgopal RaoMicro1 Yellow RoomNot Working
97 Probe Sonicator
(Open access)
Mayur Pawar
Saurabh LodhaMicro1 Yellow RoomNot Working

Micro2 Lab
LIC : Anjum Ahmed, Deepti Rukade, Poonam Katkar
System NameSystem OwnerFaculty in-chargeLocationStatus
98 Hot wire CVD(HWCVD)
(Open access)
Anjum Ahmed
Anil KottantharayilMicro2 LabNot Working
99 Organic Evaporation System
(Open access)
Anjum Ahmed
Dinesh KabraMicro2 LabNot Working
100 4 probe Measurement (Automatic)
(Open access)
Ambika Shanker Shukla
Anjum Ahmed
Saurabh LodhaMicro2 LabNot Working
101 4 Probe Measurement (Manual)
(Open access)
Anjum Ahmed
Saurabh LodhaMicro2 LabNot Working
102 DektakXT Profilometer
(Controlled access)
Anjum Ahmed
Saurabh LodhaMicro2 LabNot Working
103 Filmetrics Reflectometer
(Open access)
Anjum Ahmed
Udayan GangulyMicro2 LabNot Working
104 Leica Microscope
(Open access)
Anjum Ahmed
Micro2 LabNot Working
105 Photoluminescence Measurement set up (PL Set up)
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiMicro2 LabNot Working
106 X-ray Photoelectron Spectroscopy
(Open access)
Anjum Ahmed
Jayeeta Biswas (Sen)
Saurabh LodhaMicro2 LabNot Working
107 Plasma Immersion Ion Implantation (PIII)
(Open access)
Jayeeta Biswas (Sen)
Anjum Ahmed
Saurabh LodhaMicro2 LabNot Working

Nano Lab
LIC : Deepti Rukade, Hemant Kshirsagar, Pijush Chakraborty
System NameSystem OwnerFaculty in-chargeLocationStatus
108 ALD
(Open access)
Jayeeta Biswas (Sen)
Saurabh LodhaNano LabNot Working
109 ALD LL
(Controlled access)
Jayeeta Biswas (Sen)
Saurabh LodhaNano LabNot Working
110 Inductively coupled plasma CVD (ICPCVD)
(Open access)
Pradeep Nyaupane
Hemant Kshirsagar
Dipankar SahaNano LabNot Working
111 Rapid Thermal Processing(RTP)
(Open access)
Pankaj Upadhyay
Pijush Chakraborty
Dipankar SahaNano LabNot Working
112 Sputter (ATC 2200)
(Controlled access)
Pijush Chakraborty
Paritosh Meihar
Udayan GangulyNano LabNot Working
113 Sputter (Orion)
(Controlled access)
Ambika Shanker Shukla
Pijush Chakraborty
Ashwin TulapurkarNano LabNot Working
114 Ultech Furnace Anneal
(Open access)
Anil KottantharayilNano LabNot Working
115 Olympus Microscope
(Open access)
Dipankar SahaNano LabNot Working
116 Sentech Ellipsometer
(Open access)
Pijush Chakraborty
Anil KottantharayilNano LabNot Working
117 Nano Wet Bench
(Open access)
Pijush Chakraborty
Saurabh LodhaNano LabNot Working

Nano Litho Lab
LIC : Akshata Bhosle, Deepti Rukade, Hemant Kshirsagar
System NameSystem OwnerFaculty in-chargeLocationStatus
118 Double Sided Aligner (DSA)
(Open access)
Yogendra Yadav
Akshata Bhosle
Dipankar SahaNano Litho LabNot Working
119 RaithEBL_Long
(Open access)
Shalini Shrivastava
Navneet Bhardwaj
Suddhasatta MahapatraNano Litho LabNot Working
120 RaithEBL_Short
(Open access)
Kartikey Thakar
Shalini Shrivastava
Suddhasatta MahapatraNano Litho LabNot Working
121 Spinner 4 inch (PMMA)
(Open access)
Akshata Bhosle
Hemant Kshirsagar
Dipankar SahaNano Litho LabNot Working
122 Spinner 8 inch (General Purpose)
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Dipankar SahaNano Litho LabNot Working
123 Spinner 8 inch (PPR)
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Dipankar SahaNano Litho LabNot Working
124 Torrey Pines Scientific Hi-temp Hotplate
(Open access)
Akshata Bhosle
Nano Litho LabNot Working
125 Torrey Pines Scientific Low-temp Hotplate
(Open access)
Akshata Bhosle
Nano Litho LabNot Working

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
LIC : Deepti Rukade, Mayur Pawar, Pijush Chakraborty
System NameSystem OwnerFaculty in-chargeLocationStatus
126 AJA 6 Target E beam Evaporator
(Controlled access)
Pijush Chakraborty
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
127 Graphene specific Argon annealing system
(Controlled access)
Anil KottantharayilNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
128 Plasma Doping System
(Open access)
Udayan GangulyNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
129 PLD I
(Controlled access)
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
130 PLD II
(Open access)
Ambika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
131 PLD III
(Controlled access)
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
132 PLD IV
(Open access)
Pijush Chakraborty
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
133 Ambios XP-2 Profilometer
(Open access)
Anjum Ahmed
Pijush Chakraborty
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
134 Ar-ion Milling
(Open access)
Ambika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
135 ICPRIE (New)
(Controlled access)
Bhanu B Upadhyay
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
136 ICPRIE (old)
(Open access)
Bhanu B Upadhyay
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
137 Plasma asher
(Open access)
Anuj Kumar Singh
Minita Surwade
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
138 1.2 Lab wet bench
(Open access)
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working

NMPF Lab
LIC : Deepti Rukade, Hemant Kshirsagar
System NameSystem OwnerFaculty in-chargeLocationStatus
139 LPCVD Furnace_PolySi, Doped PolySi
(Open access)
Anjum Ahmed
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
140 LPCVD Furnace_SixNy
(Open access)
Anjum Ahmed
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
141 LPCVD Furnace_Thermal oxidation
(Controlled access)
Anjum Ahmed
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
142 Multi target sputter – AJA International
(Controlled access)
Hemant Kshirsagar
Anjum Ahmed
Ashwin TulapurkarNMPF LabNot Working
143 Parylene CVD – SCS
(Open access)
Anjum Ahmed
Hemant Kshirsagar
Saurabh LodhaNMPF LabNot Working
144 Rapid Thermal Annealing – Annealsys
(Open access)
Hemant Kshirsagar
Anjum Ahmed
Saurabh LodhaNMPF LabWorking
145 Deep Reactive Ion Etching – Samco
(Controlled access)
Hemant Kshirsagar
Anjum Ahmed
Saurabh LodhaNMPF LabNot Working
146 RIE-1C Plasma Etcher– Samco
(Open access)
Hemant Kshirsagar
Anjum Ahmed
Suddhasatta MahapatraNMPF LabNot Working
147 Double Side Mask Aligner – Suss Microtech
(Controlled access)
Anjum Ahmed
Hemant Kshirsagar
Dipankar SahaNMPF LabNot Working
148 Spin Coater – Laurell
(Open access)
Hemant Kshirsagar
Anjum Ahmed
Dipankar SahaNMPF LabNot Working
149 Wet bench_2” RCA , Piranha
(Open access)
Hemant Kshirsagar
Anjum Ahmed
Saurabh LodhaNMPF LabWorking
150 Wet bench_Metal etching
(Open access)
Anjum Ahmed
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
151 Wet bench_Solvents
(Open access)
Anjum Ahmed
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
152 Wafer Dicer – ADT
(Controlled access)
Hemant Kshirsagar
Anjum Ahmed
Ashwin TulapurkarNMPF LabWorking
153 Wire Bonder – TPT
(Open access)
Anjum Ahmed
Pankajkumar Gound
Saurabh LodhaNMPF LabNot Working

Wet Chemistry lab
LIC : Deepti Rukade, Minita Surwade, Shilpa Kharat
System NameSystem OwnerFaculty in-chargeLocationStatus
154 2 inch RCA Clean Station
(Open access)
Minita Surwade
Pankajkumar Gound
Anil KottantharayilWet Chemistry labNot Working
155 4 inch RCA Clean Station
(Open access)
Minita Surwade
Pankajkumar Gound
Saurabh LodhaWet Chemistry labNot Working
156 General Purpose Wet Bench (Wet Chemistry Lab)
(Open access)
Minita Surwade
Saurabh LodhaWet Chemistry labNot Working
157 TMAH wet etch station
(Open access)
Minita Surwade
Saurabh LodhaWet Chemistry labNot Working
158 Scientific India Microscope
(Open access)
Anjum Ahmed
Wet Chemistry labNot Working



MarkerMeaning of marker
Not WorkingEquipment may not be used
Partially Working -- Equipment fully working but process not optimized
-- Some parts of equipment not working. Eg. Heater in Metal sputter not working
-- Not all processes that are possible in the tool are working
-- Equipment working in manual mode temporarily. Eg. RAITH sample loading is manual sometimes
Fully WorkingFully operational
Critical ToolCritical tools are widely used and their upkeep is of utmost priority. FICs should take the lead for driving the issues to make the tools UP on a high priority basis taking help from all teams (purchase, EMT, facility, process).


Definition of 'Controlled access' for Equipment in labs at IITBNF:


'Controlled access' is marked for certain tools to ensure that equipment is used on a priority basis for processing jobs which are part of Project deliverables and only after that they are made available for other users.

  • not open for training.
  • will be available for usage only through operators.
  • will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.