Equipment Status

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7.1 Lab
LIC : Pankajkumar Gound, Pradnya Chabbi, Pranita Sharma
System NameSystem OwnerFaculty in-chargeLocationStatus
1 2 inch general purpose annealing furnace_Fume hood 3Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
2 Atmospheric Furnace_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
3 Dip CoaterPankajkumar Gound
Saurabh Lodha7.1 LabWorking
4 Drying Oven_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
5 Fume Hood 4Pankajkumar Gound
7.1 LabWorking
6 Hot plate with stirrer (1)_Fume Hood 1Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
7 Hot plate with stirrer (2)_Fume Hood 1Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
8 Hot plate with stirrer (3)_2 arm glove boxPankajkumar Gound
Saurabh Lodha7.1 LabWorking
9 Hot plate with stirrer (4)_4-arm glove boxPankajkumar Gound
7.1 LabWorking
10 Hydrothermal Reactor_Fume Hood 27.1 LabWorking
11 pH MeterPankajkumar Gound
7.1 LabWorking
12 Schlenk Line (2)_Fume Hood 3Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
13 SILAR controllerPankajkumar Gound
7.1 LabWorking
14 Spin Coater_4 arm glove boxPankajkumar Gound
7.1 LabWorking
15 Thermogravimetric AnalyzerPankajkumar Gound
Saurabh Lodha7.1 LabWorking
16 Tube Furnace_Fume hood 5Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
17 Contact Angle System (Data Physics)Pankajkumar Gound
Ankitha Bangera
Saurabh Lodha7.1 LabWorking
18 FTIR Spectrometer (Spectrum 65)Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
19 Olympus Microscope_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
20 UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab)Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
21 2-arm glove box_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
22 4-arm glove box_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
23 Chemical Mechanical PlanarisationUdayan Ganguly7.1 LabWorking
24 Schlenk Line (1)_Fume Hood 1Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
25 Owlstone Vapour Generator (OVG-4)Saurabh Lodha7.1 LabWorking
26 Ultrasonicator_Fume Hood 1Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
27 UV-Ozone Cleaner_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
28 Wafer bonderDipankar Saha7.1 LabPartially Working
29 Wire BonderKulasekaran Muniappan
Suddhasatta Mahapatra7.1 LabWorking

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)
LIC : Pankaj Upadhyay, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
30 Temperature Dependent Spectral Response Measurement system - PL set upPratim Saha
Tarni Aggarwal
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working
31 Transient Absorption Pump Probe SpectrometerShonal Chouksey
Vikas Pendem
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)
LIC : Jaya Jha, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
32 RF Cryogenic Device Characterization systemJaya Jha
Dipankar SahaApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
LIC : Kulasekaran Muniappan, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
33 FPA (Focal Plane Array) Characterization set upKulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
34 Hall Measurement SystemDebi Prasad Panda
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
35 Spectral Response-single pixel characterisationKulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working

Bio Sensors Lab (NanoE bldg, 7th floor)
LIC : Madhuri Vinchurkar, Pradnya Chabbi, Rajul Patkar
System NameSystem OwnerFaculty in-chargeLocationStatus
36 Eppendorf FemtoJet 4x MicroinjectorPankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working
37 PotentiostatSaurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Working
38 Contact Angle Instrument (GBX)Pankajkumar Gound
Madhuri Vinchurkar
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Working
39 Fluorescence Microscope (Z1)Madhuri Vinchurkar
Kasturi SahaBio Sensors Lab (NanoE bldg, 7th floor)Working
40 FTIRKalyani Patrikar
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Working
41 UV-Vis-NIR Spectrometer - Lambda 750Ankitha Bangera
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Working
42 Laser Engraving System (LES)Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working

Char Lab-2
LIC : Nitin Patil, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
43 microPLSayantan Ghosh
Kartikey Thakar
Saurabh LodhaChar Lab-2Partially Working
44 PPMS - Integrated cryogen-free systemPratim Saha
Ambika Shanker Shukla
Ashwin TulapurkarChar Lab-2Working

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)
LIC : Charu Saini, Pradnya Chabbi, Yaswanth Chebrolu
System NameSystem OwnerFaculty in-chargeLocationStatus
45 Aries(Temperature Dependent IV/CV)Charu Saini
Yaswanth Chebrolu
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
46 Cryogenic probe stationHimani Jawa
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
47 Cygnus(Organic Device Characterization)Yaswanth Chebrolu
Charu Saini
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
48 Phoenix (Temperature Dependent IV/CV)Yaswanth Chebrolu
Charu Saini
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
49 Polaris (Stress/Long Time Measurements)Sandip Lashkare
Yaswanth Chebrolu
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
50 Proxima (Fast IV Measurement/ B1500)Yaswanth Chebrolu
Charu Saini
Anil KottantharayilDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
51 RIGEL (Keysight B1500)Yaswanth Chebrolu
Sandip Lashkare
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
52 Sirius (NBTI Setup)Charu Saini
Yaswanth Chebrolu
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
53 Vega (Room Temperature IV/ CV)Charu Saini
Yaswanth Chebrolu
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working

EC Lab
LIC : Minita Surwade, Pradnya Chabbi, Pranita Sharma
System NameSystem OwnerFaculty in-chargeLocationStatus
54 Electroplating system - Au/Ni/CuMinita Surwade
Dipankar SahaEC LabWorking
55 PLD target making furnaceSubhananda ChakrabartiEC LabWorking
56 General Purpose Wet Bench (EC Lab)Minita Surwade
Anil KottantharayilEC LabWorking
57 Cross section TEM sample preparation unit - DimplerNavneet Bhardwaj
Minita Surwade
Anil KottantharayilEC LabWorking
58 Cross section TEM sample preparation unit - Disc CutterNavneet Bhardwaj
Minita Surwade
Anil KottantharayilEC LabWorking
59 Cross section TEM sample preparation unit - PIPSNavneet Bhardwaj
Minita Surwade
Anil KottantharayilEC LabWorking
60 Cross section TEM sample preparation unit - Ultrasonic CutterNavneet Bhardwaj
Minita Surwade
Anil KottantharayilEC LabWorking
61 EC Lab Hot air OvenPradnya Chabbi
Minita Surwade
Ashwin TulapurkarEC LabWorking
62 Logitech PM5 Precision Lapping and Polishing MachineKulasekaran Muniappan
Subhananda ChakrabartiEC LabWorking
63 Logitech WSB2 Wafer Substrate Bonding UnitKulasekaran Muniappan
Subhananda ChakrabartiEC LabWorking
64 Spinner 2 Inch (PDMS)Minita Surwade
Dipankar SahaEC LabWorking
65 Vapor generator for explosive detectionV Ramgopal RaoEC LabWorking

MBE Clean Room 1 (NanoE bldg, Gr floor)
LIC : Jay Agawane, Pradnya Chabbi, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
66 Molecular Beam Epitaxy III NitridesRITAM SARKAR
Apurba LahaMBE Clean Room 1 (NanoE bldg, Gr floor)Working
67 Molecular Beam Epitaxy III-VDebi Prasad Panda
Subhananda ChakrabartiMBE Clean Room 1 (NanoE bldg, Gr floor)Working
68 Molecular Beam Epitaxy Si, Ge, SnSuddhasatta MahapatraMBE Clean Room 1 (NanoE bldg, Gr floor)Working

MBE Clean Room 2 (NanoE bldg, Gr floor)
LIC : Jay Agawane, Pradnya Chabbi, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
69 6 Target E Beam EvaporatorGoma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
70 In Thermal EvaporatorGoma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
71 DicerKulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
72 Flip Chip BonderKulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working

MCL Lab
LIC : Aniruddha Khade
System NameSystem OwnerFaculty in-chargeLocationStatus
73 MFP-3D-AFMTarni Aggarwal
Navneet Bhardwaj
Dipankar SahaMCL LabWorking

Micro1 Lab
LIC : Hemlata Tiwari, Minita Surwade, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
74 2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace)Pankajkumar Gound
Amita Rawat
Anil KottantharayilMicro1 LabWorking
75 2 inch Boron_Solid source Diffusion FurnacePankajkumar Gound
Anil KottantharayilMicro1 LabWorking
76 2 inch CMOS specific FGA furnaceKalaivani Srinivasan
Anil KottantharayilMicro1 LabWorking
77 2 inch Dry oxidation FurnaceAmita Rawat
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
78 2 inch N2 Annealing FurnacePankajkumar Gound
Anil KottantharayilMicro1 LabWorking
79 2 inch Phosphorous_Solid source Diffusion Furnacesuren patwardhan
Anil KottantharayilMicro1 LabPartially Working
80 2 inch Wet oxidation FurnaceAmita Rawat
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
81 4 target E-beam evaporatorNama Premsai
Apurba LahaMicro1 LabPartially Working
82 Dielectric - sputter SystemMadhuri Mishra
Ashwin TulapurkarMicro1 LabPartially Working
83 Gold Electroplating SystemBhanu B Upadhyay
Micro1 LabWorking
84 Thermal Evaporator - AlSwasti Bhatia
Minita Surwade
Anil KottantharayilMicro1 LabWorking
85 Thermal Evaporator-Cr/AuAnjum Ahmed
Minita Surwade
Saurabh LodhaMicro1 LabWorking
86 HRXRDSwagata Bhunia
Apurba LahaMicro1 LabWorking
87 SEM EVO 18Madhuri Mishra
Sumit Saha
Suddhasatta MahapatraMicro1 LabNot Working
88 Tube WasherMinita Surwade
Anil KottantharayilMicro1 LabWorking

Micro1 Yellow Room
LIC : Akshata Bhosle, Mayur Pawar, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
89 Multi-pocket Electron-beam Evaporator (4 target - GaN)Yogendra Yadav
Sreenadh Surapaneni
Dipankar SahaMicro1 Yellow RoomWorking
90 STSRIEKishor Kumar Mandal
Rowtu Srinu
Suddhasatta MahapatraMicro1 Yellow RoomWorking
91 Karl Suss MJB4 Mask Aligner Hitesh Kamble
Hemant Kshirsagar
Apurba LahaMicro1 Yellow RoomWorking
92 Laser WriterHitesh Kamble
Pankaj Upadhyay
Kasturi SahaMicro1 Yellow RoomWorking
93 Spinner 2 inch (General Purpose)Hitesh Kamble
Saurabh LodhaMicro1 Yellow RoomWorking
94 Spinner 2 inch (SU8, PPR)Hitesh Kamble
Hemant Kshirsagar
Saurabh LodhaMicro1 Yellow RoomWorking
95 Barn-stead Lab-line OvenHitesh Kamble
V Ramgopal RaoMicro1 Yellow RoomWorking
96 Probe SonicatorHitesh Kamble
Saurabh LodhaMicro1 Yellow RoomWorking

Micro2 Lab
LIC : Anjum Ahmed, Poonam Katkar, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
97 Hot wire CVD(HWCVD)Anjum Ahmed
Anil KottantharayilMicro2 LabWorking
98 Organic Evaporation SystemKalyani Patrikar
Anjum Ahmed
Dinesh KabraMicro2 LabWorking
99 4 probe Measurement (Automatic)Ambika Shanker Shukla
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
100 4 Probe Measurement (Manual)Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
101 DektakXT ProfilometerAnjum Ahmed
Saurabh LodhaMicro2 LabWorking
102 Filmetrics ReflectometerAnjum Ahmed
Udayan GangulyMicro2 LabWorking
103 Leica MicroscopeAnjum Ahmed
Micro2 LabWorking
104 Photoluminescence Measurement set up (PL Set up)Kulasekaran Muniappan
Subhananda ChakrabartiMicro2 LabPartially Working
105 X-ray Photoelectron SpectroscopyAnjum Ahmed
Jayeeta Biswas (Sen)
Saurabh LodhaMicro2 LabWorking
106 Plasma Immersion Ion Implantation (PIII)Jayeeta Biswas (Sen)
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking

Nano Lab
LIC : Hemant Kshirsagar, Hitesh Kamble, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
107 ALDJayeeta Biswas (Sen)
Saurabh LodhaNano LabWorking
108 ALD LLJayeeta Biswas (Sen)
Saurabh LodhaNano LabWorking
109 Inductively coupled plasma CVD (ICPCVD)Hitesh Kamble
Dipankar SahaNano LabWorking
110 Rapid Thermal Processing(RTP)Pankaj Upadhyay
Hitesh Kamble
Dipankar SahaNano LabWorking
111 Sputter (ATC 2200)Pijush Chakraborty
Amita Rawat
Udayan GangulyNano LabWorking
112 Sputter (Orion) Ambika Shanker Shukla
Pijush Chakraborty
Ashwin TulapurkarNano LabWorking
113 Ultech Furnace AnnealAnil KottantharayilNano LabWorking
114 Olympus MicroscopeDipankar SahaNano LabWorking
115 Sentech EllipsometerNama Premsai
Anil KottantharayilNano LabWorking
116 Nano Wet BenchPijush Chakraborty
Hitesh Kamble
Saurabh LodhaNano LabWorking


Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
LIC : Mayur Pawar, Pijush Chakraborty, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
125 AJA 6 Target E beam EvaporatorNama Premsai
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
126 Graphene specific Argon annealing systemRobin Singla
Anil KottantharayilNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
127 Plasma Doping SystemRowtu Srinu
Udayan GangulyNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
128 PLD ISENTHILKUMAR R
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
129 PLD IIAmbika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
130 PLD IIISENTHILKUMAR R
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
131 PLD IVPijush Chakraborty
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
132 Ambios XP-2 ProfilometerAnjum Ahmed
Pijush Chakraborty
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
133 Ar-ion MillingAmbika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
134 ICPRIE (New)Bhanu B Upadhyay
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Partially Working
135 ICPRIE (old)Bhanu B Upadhyay
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
136 Plasma asherAnuj Kumar Singh
Minita Surwade
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
137 1.2 Lab wet benchDipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working

NMPF Lab
LIC : Hemant Kshirsagar, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
138 LPCVD Furnace_PolySi, Doped PolySiPradnya Chabbi
Hemant Kshirsagar
Anil KottantharayilNMPF LabWorking
139 LPCVD Furnace_SixNyPradnya Chabbi
Hemant Kshirsagar
Anil KottantharayilNMPF LabWorking
140 LPCVD Furnace_Thermal oxidationPradnya Chabbi
Hemant Kshirsagar
Anil KottantharayilNMPF LabWorking
141 Multi target sputter – AJA InternationalHemant Kshirsagar
Pradnya Chabbi
Ashwin TulapurkarNMPF LabWorking
142 Parylene CVD – SCSPradnya Chabbi
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
143 Rapid Thermal Annealing – AnnealsysHemant Kshirsagar
Pradnya Chabbi
Saurabh LodhaNMPF LabWorking
144 Wet bench_SolventsPradnya Chabbi
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
145 Deep Reactive Ion Etching – SamcoPradnya Chabbi
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
146 RIE-1C Plasma Asher – SamcoHemant Kshirsagar
Pradnya Chabbi
Suddhasatta MahapatraNMPF LabWorking
147 Double Side Mask Aligner – Suss MicrotechPradnya Chabbi
Hemant Kshirsagar
Dipankar SahaNMPF LabWorking
148 Spin Coater – LaurellHemant Kshirsagar
Pradnya Chabbi
Dipankar SahaNMPF LabWorking
149 Wet bench_2” RCA , PiranhaHemant Kshirsagar
Pradnya Chabbi
Saurabh LodhaNMPF LabWorking
150 Wet bench_Metal etchingPradnya Chabbi
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
151 Wafer Dicer – ADTHemant Kshirsagar
Pradnya Chabbi
Ashwin TulapurkarNMPF LabWorking
152 Wire Bonder – TPTPradnya Chabbi
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking




Status SymbolMeaning of Status Symbol
Not WorkingEquipment may not be used
Partially WorkingEquipment working with some minor problem****
Fully WorkingFully operational
Critical Tool


****
  • Equipment fully working but process not optimized
  • Some parts of equipment not working
          Ex:-Heater in Metal sputter not working
  • Some process working, other not
  • Equipment working in manual mode.
          Ex:-RAITH sample loading is manual sometimes

Definition of 'Controlled access' for Equipment in labs at IITBNF:
  • not open for training.
  • will be available for usage only through operators.
  • will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.

This is to ensure that these critical equipment are used on a priority basis for processing jobs which are part of Project deliverables and then made available to other users.