Equipment Status

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7.1 Lab
LIC : Deepti Rukade, Minita Surwade, Pankajkumar Gound
System NameSystem OwnerFaculty in-chargeLocationStatus
1 Atmospheric Furnace_AMAT CLEAN Lab Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
2 Dip Coater_Fume Hood 1 Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
3 Drying Oven_AMAT CLEAN Lab Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
4 Fume Hood 4 Pankajkumar Gound
7.1 LabWorking
5 Hot plate with stirrer (1)_Fume Hood 1 Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
6 Hot plate with stirrer (2)_Fume Hood 1 Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
7 Hot plate with stirrer (3)_Fume Hood 3 Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
8 Hot plate with stirrer (4)_Fume Hood 3 Pankajkumar Gound
7.1 LabWorking
9 Hydrothermal Reactor_Fume Hood 2 7.1 LabWorking
10 pH Meter Mukul Singh
Pankajkumar Gound
7.1 LabWorking
11 Schlenk Line (2)_Fume Hood 3 Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
12 SILAR controller_Fume Hood 1 Pankajkumar Gound
7.1 LabWorking
13 Spin Coater_4 arm glove box Pankajkumar Gound
7.1 LabWorking
14 Thermogravimetric Analyzer Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
15 Tube Furnace_Fume hood 5 Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
16 Ultrasonicator_Fume Hood 1 Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
17 UV-Ozone Cleaner_AMAT CLEAN Lab Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
18 Contact Angle System (Data Physics) Pankajkumar Gound
Ankitha Bangera
Saurabh Lodha7.1 LabWorking
19 FTIR Spectrometer (Spectrum 65) Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
20 Olympus Microscope_AMAT CLEAN Lab Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
21 UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab) Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
22 2-arm glove box (1)_AMAT CLEAN Lab Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
23 2-arm glove box_AMAT CLEAN Lab Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
24 4-arm glove box_AMAT CLEAN Lab Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
25 Schlenk Line (1)_Fume Hood 1 Pankajkumar Gound
Saurabh Lodha7.1 LabWorking

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Pankaj Upadhyay
System NameSystem OwnerFaculty in-chargeLocationStatus
26 Temperature Dependent Spectral Response Measurement system - PL set up Pratim Saha
Tarni Aggarwal
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working
27 Transient Absorption Pump Probe Spectrometer Shonal Chouksey
Vikas Pendem
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Mudassar Meer
System NameSystem OwnerFaculty in-chargeLocationStatus
28 RF Cryogenic Device Characterization system Mudassar Meer
Akhil Kumar S
Dipankar SahaApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Kulasekaran Muniappan
System NameSystem OwnerFaculty in-chargeLocationStatus
29 FPA (Focal Plane Array) Characterization set up Hemant Ghadi
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
30 Hall Measurement System Debi Prasad Panda
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Not Working
31 Spectral Response-single pixel characterisation Hemant Ghadi
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working

Bio Sensors Lab (NanoE bldg, 7th floor)
LIC : Deepti Rukade, Madhuri Vinchurkar, Rajul Patkar
System NameSystem OwnerFaculty in-chargeLocationStatus
32 Nano Dispenser Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working
33 Contact Angle Instrument (GBX) Pankajkumar Gound
Madhuri Vinchurkar
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Working
34 Fluorescence Microscope (Z1) Dilip Agarwal
Madhuri Vinchurkar
Kasturi SahaBio Sensors Lab (NanoE bldg, 7th floor)Working
35 FTIR Kalyani Patrikar
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Working
36 Potentiostat Mukul Singh
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Working
37 UV-Vis-NIR Spectrometer - Lambda 750 Ankitha Bangera
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Working
38 Laser Engraving System (LES) Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working

BioMEMS Lab (Micro - 2)
LIC : Anjum Ahmed, Deepti Rukade
System NameSystem OwnerFaculty in-chargeLocationStatus
39 Oven Anjum Ahmed
BioMEMS Lab (Micro - 2)Not Working


Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)
LIC : Deepti Rukade, Sadaf Parwaiz, THIRUNAVUKKARASU A
System NameSystem OwnerFaculty in-chargeLocationStatus
44 Aries(Temperature Dependent IV/CV) Charu Saini
THIRUNAVUKKARASU A
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
45 Cryogenic probe station Himani Jawa
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
46 Cygnus(Organic Device Characterization) Charu Saini
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
47 Phoenix (Temperature Dependent IV/CV) Charu Saini
THIRUNAVUKKARASU A
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
48 Polaris (Stress/Long Time Measurements) Sandip Lashkare
THIRUNAVUKKARASU A
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
49 Proxima (Fast IV Measurement/ B1500) THIRUNAVUKKARASU A
Charu Saini
Anil KottantharayilDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
50 RIGEL (Keysight B1500) Sandip Lashkare
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
51 Sirius (NBTI Setup) Charu Saini
THIRUNAVUKKARASU A
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
52 Vega (Room Temperature IV/ CV) Charu Saini
THIRUNAVUKKARASU A
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working

EC Lab
LIC : Deepti Rukade, Sharanya Sasidharan
System NameSystem OwnerFaculty in-chargeLocationStatus
53 Electroplating system - Au/Ni/Cu Minita Surwade
Sharanya Sasidharan
Dipankar SahaEC LabWorking
54 PLD target making furnace Punam Murkute
Subhananda ChakrabartiEC LabWorking
55 General Purpose Wet Bench (EC Lab) Punam Murkute
Sharanya Sasidharan
Anil KottantharayilEC LabWorking
56 TMAH wet etch station Jawaid Alam
Sharanya Sasidharan
Saurabh LodhaEC LabWorking
57 Cross section TEM sample preparation unit - Dimpler Navneet Bhardwaj
Sharanya Sasidharan
Anil KottantharayilEC LabWorking
58 Cross section TEM sample preparation unit - Disc Cutter Navneet Bhardwaj
Sharanya Sasidharan
Anil KottantharayilEC LabWorking
59 Cross section TEM sample preparation unit - PIPS Navneet Bhardwaj
Sharanya Sasidharan
Anil KottantharayilEC LabWorking
60 Cross section TEM sample preparation unit - Ultrasonic Cutter Navneet Bhardwaj
Sharanya Sasidharan
Anil KottantharayilEC LabWorking
61 EC Lab Hot air Oven Punam Murkute
Sharanya Sasidharan
EC LabWorking
62 Logitech PM5 Precision Lapping and Polishing Machine Sourabh Upadhyay
Subhananda ChakrabartiEC LabWorking
63 Logitech WSB2 Wafer Substrate Bonding Unit Subhananda ChakrabartiEC LabWorking
64 Spinner 2 Inch (PDMS) Sharanya Sasidharan
Minita Surwade
Dipankar SahaEC LabWorking
65 Vapor generator for explosive detection V Ramgopal RaoEC LabWorking

MBE Clean Room 1 (NanoE bldg, Gr floor)
LIC : Debi Prasad Panda, Deepti Rukade, Kankat Ghosh
System NameSystem OwnerFaculty in-chargeLocationStatus
66 Molecular Beam Epitaxy III Nitrides Kankat Ghosh
Apurba LahaMBE Clean Room 1 (NanoE bldg, Gr floor)Working
67 Molecular Beam Epitaxy III-V Debi Prasad Panda
Subhananda ChakrabartiMBE Clean Room 1 (NanoE bldg, Gr floor)Working
68 Molecular Beam Epitaxy Si, Ge, Sn JASWANT RATHORE
Suddhasatta MahapatraMBE Clean Room 1 (NanoE bldg, Gr floor)Working

MBE Clean Room 2 (NanoE bldg, Gr floor)
LIC : Deepti Rukade, Kulasekaran Muniappan
System NameSystem OwnerFaculty in-chargeLocationStatus
69 6 Target E Beam Evaporator Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
70 In Thermal Evaporator Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
71 Dicer Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
72 Flip Chip Bonder Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working

Micro1 Lab
LIC : Anjum Ahmed, Deepti Rukade, Minita Surwade
System NameSystem OwnerFaculty in-chargeLocationStatus
73 2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace) Pankajkumar Gound
Amita Rawat
Anil KottantharayilMicro1 LabWorking
74 2 inch Boron_Solid source Diffusion Furnace Anil KottantharayilMicro1 LabWorking
75 2 inch CMOS specific FGA furnace Kalaivani Srinivasan
Anil KottantharayilMicro1 LabWorking
76 2 inch Dry oxidation Furnace Amita Rawat
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
77 2 inch N2 Annealing Furnace Raja Sekhar Baddula
Anil KottantharayilMicro1 LabWorking
78 2 inch Phosphorous_Solid source Diffusion Furnace suren patwardhan
Anil KottantharayilMicro1 LabPartially Working
79 2 inch Wet oxidation Furnace Amita Rawat
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
80 4 target E-beam evaporator Nama Premsai
Apurba LahaMicro1 LabPartially Working
81 Dielectric - sputter System Amita Rawat
Ashwin TulapurkarMicro1 LabWorking
82 Thermal Evaporator - Al Swasti Bhatia
Sharanya Sasidharan
Anil KottantharayilMicro1 LabWorking
83 Thermal Evaporator-Cr/Au Anjum Ahmed
Sharanya Sasidharan
Saurabh LodhaMicro1 LabWorking
84 HRXRD Swagata Bhunia
Kankat Ghosh
Apurba LahaMicro1 LabWorking
85 SEM EVO 18 Deepti Rukade
Gayatri Vaidya
Suddhasatta MahapatraMicro1 LabNot Working
86 2 inch RCA Clean Station Minita Surwade
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
87 4 inch RCA Clean Station Minita Surwade
Pankajkumar Gound
Saurabh LodhaMicro1 LabWorking
88 Chemical Mechanical Planarisation Bhaskar Das
Udayan GangulyMicro1 LabWorking
89 General Purpose Wet Bench (Micro 1) Minita Surwade
Saurabh LodhaMicro1 LabWorking
90 Tube Washer Minita Surwade
Anil KottantharayilMicro1 LabWorking

Micro1 Yellow Room
LIC : Deepti Rukade, Hitesh Kamble
System NameSystem OwnerFaculty in-chargeLocationStatus
91 Multi-pocket Electron-beam Evaporator (4 target - GaN) Yogendra Yadav
Mudassar Meer
Dipankar SahaMicro1 Yellow RoomWorking
92 STSRIE Amita Rawat
Rowtu Srinu
Suddhasatta MahapatraMicro1 Yellow RoomWorking
93 Karl Suss MJB4 Mask Aligner Hitesh Kamble
Hemant Kshirsagar
Apurba LahaMicro1 Yellow RoomWorking
94 Laser Writer Hitesh Kamble
Kasturi SahaMicro1 Yellow RoomWorking
95 Spinner 2 inch (General Purpose) Hitesh Kamble
Saurabh LodhaMicro1 Yellow RoomWorking
96 Spinner 2 inch (SU8, PPR) Hitesh Kamble
Hemant Kshirsagar
Saurabh LodhaMicro1 Yellow RoomWorking
97 Barn-stead Lab-line Oven Hitesh Kamble
V Ramgopal RaoMicro1 Yellow RoomWorking
98 Probe Sonicator Hitesh Kamble
Saurabh LodhaMicro1 Yellow RoomWorking

Micro2 Lab
LIC : Anjum Ahmed, Deepti Rukade
System NameSystem OwnerFaculty in-chargeLocationStatus
99 Hot wire CVD(HWCVD) Anjum Ahmed
Anil KottantharayilMicro2 LabWorking
100 Organic Evaporation System Kalyani Patrikar
Anjum Ahmed
Dinesh KabraMicro2 LabWorking
101 4 probe Measurement (Automatic) Ambika Shanker Shukla
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
102 4 Probe Measurement (Manual) Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
103 DektakXT Profilometer Sharanya Sasidharan
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
104 Filmetrics Reflectometer Bhaskar Das
Anjum Ahmed
Udayan GangulyMicro2 LabWorking
105 Leica Microscope Anjum Ahmed
Micro2 LabWorking
106 Photoluminescence Measurement set up (PL Set up) Debabrata Das
Punam Murkute
Subhananda ChakrabartiMicro2 LabPartially Working
107 X-ray Photoelectron Spectroscopy Anjum Ahmed
Jayeeta Biswas (Sen)
Saurabh LodhaMicro2 LabNot Working
108 Plasma Immersion Ion Implantation (PIII) Jayeeta Biswas (Sen)
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking

Nano Lab
LIC : Deepti Rukade, Gayatri Vaidya, Pijush Chakraborty
System NameSystem OwnerFaculty in-chargeLocationStatus
109 ALD Dipankar Biswas
Jayeeta Biswas (Sen)
Saurabh LodhaNano LabWorking
110 ALD LL Jayeeta Biswas (Sen)
Dipankar Biswas
Saurabh LodhaNano LabWorking
111 Inductively coupled plasma CVD (ICPCVD) Hitesh Kamble
Dipankar SahaNano LabWorking
112 Rapid Thermal Processing(RTP) Akhil Kumar S
Hitesh Kamble
Dipankar SahaNano LabWorking
113 Sputter (ATC 2200) Pijush Chakraborty
Amita Rawat
Udayan GangulyNano LabWorking
114 Sputter (Orion) Ambika Shanker Shukla
Pijush Chakraborty
Ashwin TulapurkarNano LabWorking
115 Ultech Furnace Anneal Anil KottantharayilNano LabWorking
116 Olympus Microscope Dipankar SahaNano LabWorking
117 Sentech Ellipsometer Nama Premsai
Anil KottantharayilNano LabWorking
118 Nano Wet Bench Hitesh Kamble
Saurabh LodhaNano LabWorking

Nano Litho Lab
LIC : Deepti Rukade, Gayatri Vaidya, Hitesh Kamble
System NameSystem OwnerFaculty in-chargeLocationStatus
119 Double Sided Aligner (DSA) Yogendra Yadav
Hitesh Kamble
Dipankar SahaNano Litho LabWorking
120 RaithEBL_Long Gayatri Vaidya
Mudassar Meer
Suddhasatta MahapatraNano Litho LabNot Working
121 RaithEBL_Short Gayatri Vaidya
Mudassar Meer
Suddhasatta MahapatraNano Litho LabWorking
122 RaithSEM Mudassar Meer
Gayatri Vaidya
Suddhasatta MahapatraNano Litho LabNot Working
123 Spinner 4 inch (PMMA) Hitesh Kamble
Gayatri Vaidya
Dipankar SahaNano Litho LabWorking
124 Spinner 8 inch (General Purpose) Hitesh Kamble
Gayatri Vaidya
Dipankar SahaNano Litho LabNot Working
125 Spinner 8 inch (PPR) Hitesh Kamble
Gayatri Vaidya
Dipankar SahaNano Litho LabWorking
126 Torrey Pines Scientific Hi-temp Hotplate Hitesh Kamble
Gayatri Vaidya
Nano Litho LabWorking
127 Torrey Pines Scientific Low-temp Hotplate Hitesh Kamble
Gayatri Vaidya
Nano Litho LabWorking
128 Wafer bonder Gayatri Vaidya
Ayyaz Siddique
Dipankar SahaNano Litho LabPartially Working

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
LIC : Deepti Rukade, Pijush Chakraborty, Sharanya Sasidharan
System NameSystem OwnerFaculty in-chargeLocationStatus
129 AJA 6 Target E beam Evaporator Nama Premsai
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
130 Graphene specific Argon annealing system Poonam Jangid
Robin Singla
Anil KottantharayilNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
131 PLD I SENTHILKUMAR R
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
132 PLD II Varun Kumar Kushwaha
Ambika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
133 PLD III SENTHILKUMAR R
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
134 PLD IV Pijush Chakraborty
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
135 Ambios XP-2 Profilometer Anjum Ahmed
Sharanya Sasidharan
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
136 Ar-ion Milling Ambika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
137 ICPRIE (New) Bhanu B Upadhyay
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Partially Working
138 ICPRIE (old) Bhanu B Upadhyay
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
139 Plasma asher Sharanya Sasidharan
JASWANT RATHORE
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Partially Working
140 1.2 Lab wet bench Sudipta Das
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working



Status SymbolMeaning of Status Symbol
Not WorkingEquipment may not be used
Partially WorkingEquipment working with some minor problem****
Fully WorkingFully operational


****
  • Equipment fully working but process not optimized
  • Some parts of equipment not working
          Ex:-Heater in Metal sputter not working
  • Some process working, other not
  • Equipment working in manual mode.
          Ex:-RAITH sample loading is manual sometimes

Definition of 'Controlled access' for Equipment in labs at IITBNF:
  • not open for training.
  • will be available for usage only through operators.
  • will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.

This is to ensure that these critical equipment are used on a priority basis for processing jobs which are part of Project deliverables and then made available to other users.