Equipment Details



Name of the EquipmentDouble Sided Aligner (DSA)
Categorylitho/analytical
OperatorHitesh Kamble
Hemant Kshirsagar
System OwnerYogendra Yadav
yogendra.yadav@iitb.ac.in

Hitesh Kamble
hit.kamble@ee.iitb.ac.in

Short NameDSA
MakeEVG
ModelEVG620
Serial NumberS070098
FootPrintLength 1.37 mtr, Breadth 2.23 mtr, Height 1.52
InstallationDate11/03/2012
Equipment TypeLithography tools
LocationNano Litho Lab
AMC Available
Local DealerMr. Amaresh Gaoundi(Tesscorn Nanoscience Inc.)

TESSCORN NANO SCIENCE INC. 1285, 5th Main, 17th Cross HSR Sector 7 Bangalore 560068, India t:+91 80 2572 9425 f:+91 80 2572 9703 info@tesscorn-nanoscience.com E-mail:purusho@tesscorn-nanoscience.com Service Eng: amaresh@tesscorn.com
Actual DealerM/s E.V. Group

M/s E.V. Group, E. Thallner GmbH, DI Erich Thallner StraBe 1A-4780 Scharding, Austria Email: Sales@EVGroup.com Phone: 43 7712 5311 0 parts&services@EVGroup.com
SOP SOP/1_SOP.pdf
Training & other policy documentsPOLICY/1_POLICY.pdf
Recipies
Glimpse GLIMPSE/1_Glimpse.pdf
Tool Facilities RequirementsNitrogen, oil for oil pump
AccessOpen
Lab Phone No4411
Substrate allowedSi, Ge, GaAs, GaN
Substrate Dimension4 inch, 2 inch and small samples
Chemical allowedNA, All that are allowed in the Nanolab
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksNA