Equipment Details



Name of the EquipmentVega (Room Temperature IV/ CV)
Categorylitho/analytical
OperatorYaswanth Chebrolu
System OwnerCharu Saini
173079013@iitb.ac.in

Yaswanth Chebrolu
183079020@iitb.ac.in

Short NameVega
MakeKeithley
Model4200-SCS
Serial NumberEP6-15558
FootPrint2.5m x 1.5 m
InstallationDate07/01/2009
Equipment TypeElectrical characterization tools
LocationDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)
AMC Required
Local DealerN.A.

N.A.
Actual DealerSuss Microtec

info@suss.com
SOP SOP/127_SOP.pdf
Training & other policy documentsPOLICY/127_POLICY.pdf
Recipies
Glimpse GLIMPSE/127_GLIMPSE.pdf
Tool Facilities Requirements
AccessOpen
Lab Phone No4488 Ext 114
Substrate allowedSi/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Substrate DimensionWafer : 1cm x 1cm - 5cm x 5cm & Pad-Size: Min- 50 micron x 50 micron
Chemical allowedNA, Si/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksNA