Equipment Details



Name of the EquipmentSpinner 2 inch (SU8, PPR)
Categorylitho/analytical
OperatorAkshata Bhosle
System OwnerHitesh Kamble
hit.kamble@ee.iitb.ac.in

Hemant Kshirsagar
hemant@ee.iitb.ac.in

Short Name
Make
ModelWS-4008-6NPP/ LIT
Serial Number05626
FootPrint11
InstallationDate
Equipment TypeLithography tools
LocationMicro1 Yellow Room
AMC Not Required
Local DealerM/s Simco

Actual DealerM/s Laurell Techonologies Corporation,441,Industri

E-mail:sales@laurell.com
SOP SOP/137_SOP.pdf
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsN2 gas
AccessOpen
Lab Phone No4493
Substrate allowed2
Substrate Dimension1/4 of 2
Chemical allowedAcetone for cleaning, SU8, PPR, P3HT
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarkswafers to be clean