Equipment Details



Name of the EquipmentSpinner 8 inch (General Purpose)
Categorylitho/analytical
OperatorHitesh Kamble
Hemant Kshirsagar
System OwnerHitesh Kamble
hit.kamble@ee.iitb.ac.in

Short NameGPS 8
MakeLaurell Technologies
ModelWS-400B-8NPP/LITE
Serial Number07403
FootPrint55' inch(L) x �70 inch (W) X 50 inch(H)
InstallationDate
Equipment TypeLithography tools
LocationNano Litho Lab
AMC Required
Local DealerM/s Simco Global Technology & Systems Ltd.

M/s Simco Global Technology & Systems Ltd. 304, Thacker Tower, Sector-17, Vashi, Nawi Mumbai � 400 705 Tel: 022-27801176 Email: simcoltdmumbai@vsnl.com Hirlekar- 9820106336
Actual DealerM/s Laurell Technologies Corporation

M/s Laurell Technologies Corporation 441, Industrial Drive, North Wales, PA 19454-2537 USA Phone: 215-699-7278 Email: sales@laurell.com Hirlekar- 9820106336
SOP SOP/142_SOP.pdf
Training & other policy documents
Recipies
Glimpse GLIMPSE/142_GLIMPSE.pdf
Tool Facilities RequirementsVacuum Pump, Work benches, exhaust, hot plates, N2 blower
AccessOpen
Lab Phone No4411
Substrate allowedSi, Glass, GaAs
Substrate Dimensionmax - 8 inch; min - 10cmx10cm
Chemical allowedALL PHOTORESIST, positive and negative photoresist as well as EBL resist, HMDS
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2
Contamination remarksOutside samples, NCPRE Samples, OE Lab, Na+ & K+ not allowed further information contact SO/Process InCharge