Equipment Details



Name of the EquipmentSirius (NBTI Setup)
Categorylitho/analytical
Operator
System OwnerCharu Saini
173079013@iitb.ac.in

Yaswanth Chebrolu
183079020@iitb.ac.in

Short NameSIRIUS
MakeKarl Suss
ModelPM8
Serial Number0473
FootPrint2.5X0.5
InstallationDate2009
Equipment TypeElectrical characterization tools
LocationDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)
AMC Required
Local DealerNA

NA
Actual DealerSuss Microtec

info@suss.com
SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsN.A.
AccessOpen
Lab Phone No4488 Ext Flash 114
Substrate allowedSi/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Substrate DimensionWafer : 1cm x 1cm - 5cm x 5cm & Pad-Size: Min- 50 micron x 50 micron
Chemical allowedN.A., Si/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Precursors/ Targets allowed
*Based on stock availability
N.A.
Precursor/ Target loaded inside tool
Target dimensionN.A.
Gases allowedN.A.
Contamination remarksMaterials that don't vaporize at Room Temp.