Equipment Details



Name of the EquipmentSEM EVO 18
Categorylitho/analytical
OperatorMadhuri Mishra
Deepti Rukade
System OwnerMadhuri Mishra
madhuri016@ee.iitb.ac.in

Sumit Saha
susaha@ee.iitb.ac.in

Short NameEVO Sem
MakeCarl ZeissSMT Ltd
ModelZeiss EVO 18
Serial NumberEVO18-14-77
FootPrint
InstallationDate09/24/2012
Equipment TypeMaterial and structural characterization tools
LocationMicro1 Lab
AMC Required
Local DealerRamesh Hegde/ Vasudeo K

101, Akruti Avenues 17/1/2, Wakad Thergaon Road Wakad. Pune -411 057, India. Tel- 91-20-65110600
Actual DealerCarl Zeiss SMT Ltd

Carl Zeiss India (Bangalore)Pvt. Ltd, 4th level block-D, NDM-II Building, Netaji Subhash Place, Pitampura, New Delhi-110 034, India
SOP SOP/159_SOP.pdf
Training & other policy documents
Recipies
Glimpse GLIMPSE/159_Glimpse.pdf
Tool Facilities RequirementsAC, N2, Lint free cloths, gloves, carbon tape
AccessOpen
Lab Phone No4405
Substrate allowedSi, III-V, Glass, Sapphire, Quartz
Substrate DimensionMax- 1cmx1cm
Chemical allowedNA, All Materials allowed. Powdered materials allowed on case by case basis
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2
Contamination remarksPowdered materials allowed on case by case basis. Na, K, Cu is allowed on general purpose stubs