Equipment Details



Name of the EquipmentKarl Suss MJB4 Mask Aligner
Categorylitho/analytical
OperatorHitesh Kamble
Akshata Bhosle
System OwnerHitesh Kamble
hit.kamble@ee.iitb.ac.in

Hemant Kshirsagar
hemant@ee.iitb.ac.in

Short NameMJB4
MakeSuss Microtec
ModelMJB4
Serial Number06130848
FootPrint603mm*769mm*658mm
InstallationDate10/15/2013
Equipment TypeLithography tools
LocationMicro1 Yellow Room
AMC Required
Local DealerOM Scientific

M/s Om Scientific,Pune Contact person :-Anand Vairagar/Shaliesh Latey(shaileshlatey@gmail.com) 917563100/9867770801
Actual DealerSuss Microtec

Suss Microtec M/s Suss MicroTec , Germany http://www.suss.com/en.html
SOP SOP/190_SOP.pdf
Training & other policy documentsPOLICY/190_POLICY.pdf
Recipies
Glimpse GLIMPSE/190_GLIMPSE.pdf
Tool Facilities RequirementsNItrogen gas and CDA
AccessOpen
Lab Phone No4405
Substrate allowedSi,GaN, GaAs, Ge
Substrate Dimensionupto 4 inch
Chemical allowedonly photo resist, sio2,si
Precursors/ Targets allowed
*Based on stock availability
N/A
Precursor/ Target loaded inside tool
Target dimensionN/A
Gases allowedNitrogen
Contamination remarks