Equipment Details



Name of the EquipmentTube Washer
Categoryclean
Operator
System OwnerMinita Surwade
minita@iitb.ac.in

Short Name
Make
Model
Serial Number
FootPrint
InstallationDate
Equipment TypeMiscellaneous
LocationMicro1 Lab
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsExhaust Blower,DI water line
AccessOpen
Lab Phone No4405
Substrate allowedNA
Substrate Dimension
Chemical allowed2% HF and DI Water, Quartz furnace tube
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarks