Equipment Details



Name of the EquipmentTorrey Pines Scientific Hi-temp Hotplate
Categorygold contaminated
OperatorHitesh Kamble
System OwnerHitesh Kamble
hit.kamble@ee.iitb.ac.in

Short NameHot plate
MakeTorrey Pines Scientific
ModelHP51A-2
Serial Number02111101
FootPrint34cmX48cmX17cm
InstallationDate
Equipment TypeMiscellaneous
LocationNano Litho Lab
AMC Not Required
Local DealerNA

NA
Actual DealerNA

NA
SOP SOP/221_SOP.pdf
Training & other policy documents
Recipies
Glimpse GLIMPSE/221_GLIMPSE.pdf
Tool Facilities RequirementsElectric connection
AccessOpen
Lab Phone No4411
Substrate allowedSi, III-V, Glass, Sapphire, Quartz, fused silica
Substrate DimensionMin- 1cmx1cm, Max- 4 inch - 8 inch wafer
Chemical allowedIPA, Acetone, All that is allowed in NYR
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksPl use Al foil on top whenever required