Equipment Details



Name of the EquipmentTorrey Pines Scientific Low-temp Hotplate
Categorygold contaminated
OperatorHitesh Kamble
System OwnerHitesh Kamble
hit.kamble@ee.iitb.ac.in

Short NameHot plate
MakeTorrey Pines Scientific
ModelHP30A-2
Serial Number08180905
FootPrint24cmX40cmX13cm
InstallationDate
Equipment TypeMiscellaneous
LocationNano Litho Lab
AMC Not Required
Local DealerNA

NA
Actual DealerNA

NA
SOP SOP/222_SOP.pdf
Training & other policy documents
Recipies
Glimpse GLIMPSE/222_GLIMPSE.pdf
Tool Facilities RequirementsElectrical connection
AccessOpen
Lab Phone No4411
Substrate allowedSi, III-V, Glass, Sapphire, Quartz, fused silica
Substrate DimensionMin- 1cmx1cm, Max- 4 inch - 8 inch wafer
Chemical allowedIPA, Acetone, All that is allowed in NYR
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksuse Al foil whenever required