Equipment Details



Name of the EquipmentPLD target making furnace
Categoryclean
Operator
System Owner
Short Name
Make/ Model/
Critical ToolNo
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationEC Lab
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone NoNo Number
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks