Equipment Details



Name of the EquipmentPLD III
Categoryclean
Operator
System OwnerSENTHILKUMAR R
senthilraja@iitb.ac.in

Short Name
Make
Model
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNanoelectronics Processing Lab (NanoE bldg, 1st floor)
AMC Required
Local DealerSubash Pai

Dr. Subhash Pai Excel Instruments Gala no. 9 & 10, Bldg no.2, Dias Industrial Estate, Sativali Naka, Vasai (E), Palghar - 401 208. Ph: 91 250 2480377 www.excelinstruments.biz Cell: 9867312963
Actual DealerExcel Instruments

Dr. Subhash Pai Excel Instruments Gala no. 9 & 10, Bldg no.2, Dias Industrial Estate, Sativali Naka,Vasai (E), Palghar - 401 208. Ph: 91 250 2480377 www.excelinstruments.biz Cell: 9867312963
SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessControlled
Lab Phone No4488 Ext Flash 107 OR 111
Substrate allowedSi, Ge, GaN
Substrate Dimension
Chemical allowedNA, Gd2O3, HfO2, La2O3, LaAlO2, GdScO2, Re2O3, Sc2O3, ZrO2, PCMO (All are of 4N purity)
Precursors/ Targets allowed
*Based on stock availability
Gd2O3 (Targets are for personal use)
Precursor/ Target loaded inside tool
Target dimensionDiameter = 0.5 inch (min.), 2 inch (max.)
Gases allowedN2, Ar, O2 (At least 4N purity)
Contamination remarks