Equipment Details



Name of the EquipmentPLD IV
Categoryclean
Operator
System OwnerPijush Chakraborty
P14297@iitb.ac.in

Short NamePLD IV
MakeExcel Instrument
ModelNA
Serial NumberNA
FootPrint
InstallationDate11/23/2015
Equipment TypeDeposition, Growth and Annealing systems
LocationNanoelectronics Processing Lab (NanoE bldg, 1st floor)
AMC Required
Local DealerDr. Subhash Pai

Excel Instruments Gala no. 9 & 10, Bldg no.2, Dias Industrial Estate, Sativali Naka,Vasai (E), Palghar - 401 208. Ph: 91 250 2480377 www.excelinstruments.biz Cell: 9867312963
Actual DealerDr. Subhash Pai

Excel Instruments Gala no. 9 & 10, Bldg no.2, Dias Industrial Estate, Sativali Naka,Vasai (E), Palghar - 401 208. Ph: 91 250 2480377 www.excelinstruments.biz Cell: 9867312963
SOP
Training & other policy documents
Recipies
Glimpse GLIMPSE/280_GLIMPSE.pdf
Tool Facilities Requirements
AccessOpen
Lab Phone No4488 Ext Flash 107 OR 111
Substrate allowedSi, Ge, Sapphire
Substrate Dimension2cm X 2cm max
Chemical allowedIPA / Methanol for cleaning, BFO, BDFO, LSMO, PCMO, PZT, MgO, STO, PTFO, LifePo4, LicoO2, Co2MnSi
Precursors/ Targets allowed
*Based on stock availability
BFO, BDFO, LSMO, PCMO, PZT, MgO, STO, PTFO, LifePo4, LicoO2, Co2MnSi
Precursor/ Target loaded inside tool
Target dimension2cm X 2cm max
Gases allowedAr, O2, N2
Contamination remarksNo Photoresist