Equipment Details



Name of the EquipmentTube Furnace_Fume hood 5
Categorytbd
Operator
System OwnerPankajkumar Gound
p15129@iitb.ac.in

Short NameTube furnace
Make
Model
Serial Number84092
FootPrint1.5m X 1.5m
InstallationDate09/02/2012
Equipment TypeDeposition, Growth and Annealing systems
Location7.1 Lab
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse GLIMPSE/295_GLIMPSE.pdf
Tool Facilities RequirementsElectric power supply
AccessOpen
Lab Phone No119
Substrate allowedGlass, Quartz, All kinds of semiconductor wafers
Substrate Dimension
Chemical allowed, Organic, Inorganic, Metal-organic
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedN2, O2, Ar
Contamination remarks