Equipment Details



Name of the EquipmentNano Wet Bench
Categoryclean
OperatorPijush Chakraborty
System OwnerPijush Chakraborty
P14297@iitb.ac.in

Hitesh Kamble
hit.kamble@ee.iitb.ac.in

Short Namenil
MakeNano clean Contamination Control Solutions
ModelNil
Serial NumberNil
FootPrintWidth: 154 cm breadth: 80 cm Height: 213 cm
InstallationDate03/04/2016
Equipment TypeWet chemistry tools
LocationNano Lab
AMC Not Required
Local DealerNano Clean Contamination Control Solutions

Nano Clean Contamination Control Solutions #126, 1st floor, 1st Block, BEL Layout Vidyaranyapura, Bangalore -560 097 India Mr Madhu: 09620922888
Actual DealerNano Clean Contamination Control Solutions

Nano Clean Contamination Control Solutions #126, 1st floor, 1st Block, BEL Layout Vidyaranyapura, Bangalore -560 097 India Mr Madhu: 09620922888 madhu@nanoclean.co.uk
SOP SOP/299_SOP.pdf
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsNitrogen,DI Water
AccessOpen
Lab Phone No4411
Substrate allowedSilicon,quartz,Ge
Substrate Dimensionmax 4
Chemical allowedAcetone,IPA,HF,
Precursors/ Targets allowed
*Based on stock availability
na
Precursor/ Target loaded inside tool
Target dimensionna
Gases allowedNitrogen for drying
Contamination remarksOnly cleaning of wafers allowed. Lift off and wet etching not allowed.