Equipment Details



Name of the EquipmentMFP-3D-AFM
Categoryclean
OperatorTarni Aggarwal
Navneet Bhardwaj
System OwnerTarni Aggarwal
164073004@iitb.ac.in

Navneet Bhardwaj
154076033@iitb.ac.in

Short Name
Make
Model
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationMCL Lab
AMC Required
Local Dealer

Actual Dealer

SOP SOP/323_SOP.pdf
Training & other policy documentsPOLICY/323_POLICY.pdf
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4419
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks