Equipment Details



Name of the Equipment2 inch CMOS specific FGA furnace
Categorysemi clean b
Operator
System OwnerKalaivani Srinivasan
124070001@iitb.ac.in

Short Name----
MakeNA
ModelNA
Serial NumberNA
FootPrint3.75 ft x13 ft
InstallationDate06/10/2004
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro1 Lab
AMC Required
Local DealerNA

Inhouse maintenance
Actual DealerNA

NA
SOP SOP/77_SOP.pdf
Training & other policy documentsPOLICY/77_POLICY.zip
Recipies
Glimpse GLIMPSE/77_Glimpse.pdf
Tool Facilities RequirementsN2, O2, FGA
AccessOpen
Lab Phone No4405
Substrate allowedSilicon
Substrate DimensionQuarter of 2inch, 2inch
Chemical allowedNA, Si,Al2O3,SiO2,TiO2
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2/ O2/ forming gas
Contamination remarksRCA cleaned wafer