Equipment Details



Name of the EquipmentThermal Evaporator - Al
Categorygold contaminated
OperatorAnjum Ahmed
Minita Surwade
Shilpa Kharat
System OwnerSwasti Bhatia
swasti@ee.iitb.ac.in

Minita Surwade
minita@iitb.ac.in

Short NameAl Evaporator
Make
Model
Serial Number
FootPrint200 x 140 x 203 cm
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro1 Lab
AMC Required
Local DealerMr. Khan

Hind Hivac, Mr. Khan, Bangalore, Mob. - 9740992085, Email ID - info@hivacindia.com
Actual Dealer

SOP SOP/88_SOP.pdf
Training & other policy documents
Recipies
Glimpse GLIMPSE/88_Glimpse.pdf
Tool Facilities RequirementsLN2, Water
AccessOpen
Lab Phone No4405
Substrate allowedGlass, Silicon, Polymer, glass, qurtz, Ge
Substrate Dimensionsmall pecies to 4 inch
Chemical allowedIPA, Any material (including photoresists) that will not evaporate up to 100 C
Precursors/ Targets allowed
*Based on stock availability
Al
Precursor/ Target loaded inside tool
Target dimensionpellets, slugs
Gases allowedLiquid Nitrogen
Contamination remarksSeparate crucibles need to be used for different metals