Equipment Details



Name of the EquipmentLaser Writer
Categorylitho/analytical
OperatorHitesh Kamble
Madhuri Mishra
Akshata Bhosle
System OwnerHitesh Kamble
hit.kamble@ee.iitb.ac.in

Pankaj Upadhyay
pupadhyay@iitb.ac.in

Short NameLW
MakeMicrotech
ModelLW405
Serial Number07151003
FootPrint50inchx30inch
InstallationDate05/22/2007
Equipment TypeLithography tools
LocationMicro1 Yellow Room
AMC Required
Local DealerMr. M.M.C. Kishore

Mr. M.M.C. Kishore Global Marketing Services, Bangalore, India
Actual DealerMICROTECH S.R.L.

MICROTECH s.r.l. Corso Pisani 22, 90129 Palermo, Italy,90129 Palermo. Phone: +39 091 730 3091 Fax: +39 091 730 7911 E-mail: mail@microtechweb.com
SOP SOP/92_SOP.pdf
Training & other policy documentsPOLICY/92_POLICY.pdf
Recipies RECEPIES/92_RECEPIES.PDF
Glimpse GLIMPSE/92_GLIMPSE.pdf
Tool Facilities RequirementsHotPlate, DI Water, N2 Gun
AccessOpen
Lab Phone No4493
Substrate allowedIron oxide mask plates/ Si wafer
Substrate Dimension3inch and 5 inch mask plates
Chemical allowedNA, Iron oxide mask plates/ Si wafer
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarks