Equipment Details



Name of the EquipmentPLD II
Categoryclean
Operator
System OwnerAmbika Shanker Shukla
ambikashukla@iitb.ac.in

Short NamePLD-2
MakeExcel Instruments
ModelNA
Serial NumberNA
FootPrintLength 1.95 mtr, Breadth 2.28 mtr, Height1.57
InstallationDate09/04/2009
Equipment TypeDeposition, Growth and Annealing systems
LocationNanoelectronics Processing Lab (NanoE bldg, 1st floor)
AMC Required
Local DealerDr. Subhash Pai

Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093
Actual DealerDr. Subhash Pai

Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093
SOP SOP/96_SOP.pdf
Training & other policy documentsPOLICY/96_Policy.pdf
Recipies
Glimpse GLIMPSE/96_Glimpse.pdf
Tool Facilities RequirementsAr, O2, Water
AccessOpen
Lab Phone No4488 Ext Flash 107 OR 111
Substrate allowedSi/ Ge/ GaN/ Quartz/ GaA s/ STO/ LAO/ MgO
Substrate Dimension2cm x 2cm max
Chemical allowedIPA/ Methanol (for cleaning), BFO/ BDFO/ LSMO/ PCMO/ PZT/ MgO/ STO/ PTFO/ PTS/ SRO / LiFePO4 / LiCoO2/ Co2MnSi
Precursors/ Targets allowed
*Based on stock availability
BFO/ BDFO/ LSMO/ PCMO/ PZT/ MgO/ STO/ PTFO/ PTS/ SRO/ Co2MnSi
Precursor/ Target loaded inside tool
Target dimensionBFO/ BDFO/ LSMO/ CMO/ PZT/ MgO/ STO/ PTFO/ PTS/ SRO
Gases allowedOxgen
Contamination remarksNo Photoresists