Equipment Details

Double Sided Aligner (DSA)

Name of the EquipmentDouble Sided Aligner (DSA)
OperatorAkshata(NH) Bhosle
Hemant Kshirsagar
Nikhil (NH) Palkar
System OwnerHemant Kshirsagar

Akshata(NH) Bhosle

Short Name
Make/ ModelEVG/ EVG620
Critical ToolYes
Serial NumberS070098
FootPrintLength 1.37 mtr, Breadth 2.23 mtr, Height 1.52
Equipment TypeLithography tools
LocationNano Litho Lab
AMC Available
Local DealerMr. Amaresh Gaoundi(Tesscorn Nanoscience Inc.)

TESSCORN NANO SCIENCE INC. 1285, 5th Main, 17th Cross HSR Sector 7 Bangalore 560068, India t:+91 80 2572 9425 f:+91 80 2572 9703 Service Eng:
Actual DealerM/s E.V. Group

M/s E.V. Group, E. Thallner GmbH, DI Erich Thallner StraBe 1A-4780 Scharding, Austria Email: Phone: 43 7712 5311 0 parts&
Training & other policy documentsPOLICY/1_POLICY.pdf
Glimpse GLIMPSE/1_Glimpse.pdf
Tool Facilities RequirementsNitrogen, oil for oil pump
Lab Phone No4411
Substrate allowedSi, Ge, GaAs, GaN
Substrate Dimension4 inch, 2 inch and small samples
Chemical allowedNA, All that are allowed in the Nanolab
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksNA
Last updated on: 20-Jul-2022