Equipment Details


AMAT - Ashing Chamber (Ch-D)

Name of the EquipmentAMAT - Ashing Chamber (Ch-D)
Categorysemi clean b
OperatorSandeep Mane
System OwnerBikash Dev Choudhury (NH)
d.c.bikash@iitb.ac.in

Sandeep Mane
manesandeep83@iitb.ac.in

Short Name
Make/ ModelAMAT/ NA
Critical ToolNo
Serial NumberS007009
FootPrint2 mtr X 1.73 mtr
InstallationDate06/01/2006
Equipment TypeDry Etch tools
LocationAMAT Lab
AMC Required
Local DealerNA

NA
Actual DealerAMAT

AMAT Exploration center IIT Bombay.
SOP SOP/100_SOP.pdf
Training & other policy documents
Recipies RECEPIES/100_RECEPIES.pdf
Glimpse GLIMPSE/100_GLIMPSE.pdf
Tool Facilities RequirementsAHU, Chiller, Heat exchanger, Pump, N2 plant, Exhaust
AccessOpen
Lab Phone No4402
Substrate allowedSi/ Ge
Substrate DimensionMax 8 inch wafers
Chemical allowedFor cleaning of the system IPA is used, Photo resist.
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionMin 1 cm X 1cm, Max 200 mm.
Gases allowedO2
Contamination remarksNA
Last updated on: 20-Jan-2023