AMAT - Ashing Chamber (Ch-D)
| Name of the Equipment | AMAT - Ashing Chamber (Ch-D) |
| Category | semi clean b |
| Operator | Sandeep Mane |
| System Owner | Bikash Dev Choudhury (NH) d.c.bikash@iitb.ac.in Sandeep Mane manesandeep83@iitb.ac.in |
| Short Name | |
| Make/ Model | AMAT/ NA |
| Critical Tool | No |
| Serial Number | S007009 |
| FootPrint | 2 mtr X 1.73 mtr |
| InstallationDate | 06/01/2006 |
| Equipment Type | Dry Etch tools |
| Location | AMAT Lab |
| AMC | Required |
| Local Dealer | NA NA |
| Actual Dealer | AMAT AMAT Exploration center IIT Bombay. |
| SOP | SOP/100_SOP.pdf |
| Training & other policy documents | |
| Recipies | RECEPIES/100_RECEPIES.pdf |
| Glimpse | GLIMPSE/100_GLIMPSE.pdf |
| Tool Facilities Requirements | AHU, Chiller, Heat exchanger, Pump, N2 plant, Exhaust |
| Access | Open |
| Lab Phone No | 4402 |
| Substrate allowed | Si/ Ge |
| Substrate Dimension | Max 8 inch wafers |
| Chemical allowed | For cleaning of the system IPA is used, Photo resist. |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | Min 1 cm X 1cm, Max 200 mm. |
| Gases allowed | O2 |
| Contamination remarks | NA |