AMAT - FEP Centura - DPN Chamber (Ch-A)
| Name of the Equipment | AMAT - FEP Centura - DPN Chamber (Ch-A) |
| Category | clean |
| Operator | |
| System Owner | |
| Short Name | |
| Make/ Model | Applied Materials/ FEP Centura/ Gate S |
| Critical Tool | No |
| Serial Number | NA |
| FootPrint | 2 mtr X 2.245 |
| InstallationDate | 06/01/2006 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | AMAT Lab |
| AMC | Required |
| Local Dealer | AMAT AMAT exploration center IIT Bombay. |
| Actual Dealer | AMAT AMAT exploration center IIT Bombay. |
| SOP | SOP/102_SOP.pdf |
| Training & other policy documents | |
| Recipies | RECEPIES/102_RECEPIES.pdf |
| Glimpse | |
| Tool Facilities Requirements | Chiller, AHU, Pump, Scrubber, gas |
| Access | Open |
| Lab Phone No | 4402 |
| Substrate allowed | Si/ Glass/ Ge |
| Substrate Dimension | Max 8 inch wafers |
| Chemical allowed | IPA only for chamber cleaning., SiO2, Al, Ti, HfO |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | 1cm X 1 cm to 8 inch. |
| Gases allowed | N2, O2, He |
| Contamination remarks | NA |