AMAT - FEP Centura - Polygen Chamber (Ch-B)
| Name of the Equipment | AMAT - FEP Centura - Polygen Chamber (Ch-B) |
| Category | semi clean a |
| Operator | Pradeep Nyaupane |
| System Owner | |
| Short Name | |
| Make/ Model | Applied Materials/ FEP Centura/ Gate S |
| Critical Tool | No |
| Serial Number | NA |
| FootPrint | 2 mtr X 2.245 mtr |
| InstallationDate | 06/01/2006 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | AMAT Lab |
| AMC | Required |
| Local Dealer | AMAT AMAT exploration center IIT Bomabay |
| Actual Dealer | Applied Materials, USA AMAT exploration center IIT Bomabay |
| SOP | SOP/103_SOP.pdf |
| Training & other policy documents | |
| Recipies | RECEPIES/103_RECEPIES.pdf |
| Glimpse | |
| Tool Facilities Requirements | Chiller, AHU, Gases, Scruber |
| Access | Open |
| Lab Phone No | 4402 |
| Substrate allowed | Si/ Glass/ Ge |
| Substrate Dimension | Max 8 inch wafers |
| Chemical allowed | NA, SiO2, Al2O3, HfO |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | SiH4. PH3, B2H6, NH3, NF3 |
| Contamination remarks | NA |