Equipment Details

AMAT - FEP Centura - Polygen Chamber (Ch-B)

Name of the EquipmentAMAT - FEP Centura - Polygen Chamber (Ch-B)
Categorysemi clean a
OperatorPradeep Nyaupane
System Owner
Short Name
Make/ ModelApplied Materials/ FEP Centura/ Gate S
Critical ToolNo
Serial NumberNA
FootPrint2 mtr X 2.245 mtr
Equipment TypeDeposition, Growth and Annealing systems
LocationAMAT Lab
AMC Required
Local DealerAMAT

AMAT exploration center IIT Bomabay
Actual DealerApplied Materials, USA

AMAT exploration center IIT Bomabay
SOP SOP/103_SOP.pdf
Training & other policy documents
Recipies RECEPIES/103_RECEPIES.pdf
Tool Facilities RequirementsChiller, AHU, Gases, Scruber
Lab Phone No4402
Substrate allowedSi/ Glass/ Ge
Substrate DimensionMax 8 inch wafers
Chemical allowedNA, SiO2, Al2O3, HfO
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedSiH4. PH3, B2H6, NH3, NF3
Contamination remarksNA
Last updated on: 20-Jan-2023