Name of the Equipment | Vapor generator for explosive detection |
Category | gold contaminated |
Operator | |
System Owner | |
Short Name | |
Make/ Model | / |
Critical Tool | No |
Serial Number | |
FootPrint | |
InstallationDate | |
Equipment Type | Miscellaneous |
Location | EC Lab |
AMC | Required |
Local Dealer | NA
NA |
Actual Dealer | NA
NA |
SOP | |
Training & other policy documents | |
Recipies | |
Glimpse | |
Tool Facilities Requirements | |
Access | Open |
Lab Phone No | No Number |
Substrate allowed | Si, SU-8 cantilevers, SiO2 cantilevers |
Substrate Dimension | cantilever die |
Chemical allowed | NA, All material |
Precursors/ Targets allowed *Based on stock availability | NA |
Precursor/ Target loaded inside tool | |
Target dimension | NA |
Gases allowed | N2 |
Contamination remarks | NA |