Flip Chip Bonder
Name of the Equipment | Flip Chip Bonder |
Category | gold contaminated |
Operator | Kulasekaran Muniappan |
System Owner | Kulasekaran Muniappan kulasekaran.m@iitb.ac.in |
Short Name | |
Make/ Model | / |
Critical Tool | No |
Serial Number | |
FootPrint | |
InstallationDate | |
Equipment Type | Miscellaneous |
Location | MBE Clean Room 2 (NanoE bldg, Gr floor) |
AMC | Required |
Local Dealer | |
Actual Dealer | |
SOP | SOP/117_SOP.pdf |
Training & other policy documents | POLICY/117_POLICY.pdf |
Recipies | |
Glimpse | GLIMPSE/117_Glimpse.pdf |
Tool Facilities Requirements | |
Access | Controlled |
Lab Phone No | 4488 Ext Flash 109 |
Substrate allowed | GaAs, Si, Quartz |
Substrate Dimension | 1x1cm |
Chemical allowed | , In, Al, Gold |
Precursors/ Targets allowed *Based on stock availability | |
Precursor/ Target loaded inside tool | |
Target dimension | |
Gases allowed | |
Contamination remarks |