Equipment Details


Phoenix

Name of the EquipmentPhoenix
Categorylitho/analytical
Operator
System OwnerChandan Samanta (NH)
20002653@iitb.ac.in

Short Name
Make/ ModelKeysight B1500 (Agilent) SDA/Karl Suss/ PM8
Critical ToolNo
Serial Number40180
FootPrint12ft x 3ft
InstallationDate11/11/2013
Equipment TypeElectrical characterization tools
Location2D Materials and Devices Lab
AMC Required
Local DealerN.A

N.A.
Actual DealerSuss Microtec

info@suss.com
SOP SOP/123_SOP.pdf
Training & other policy documentsPOLICY/123_POLICY.pdf
Recipies
Glimpse GLIMPSE/123_GLIMPSE.pdf
Tool Facilities RequirementsVacuum pump, Temperature Controller
AccessOpen
Lab Phone No4456
Substrate allowedSi/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Substrate DimensionWafer: 1cm x 1cm - 5cm x 5cm & Pad-Size: Min- 50 micron x 50 micron
Chemical allowedN.A., Si/ Ge/ Metal and Materials that don't vaporize at Room Temp., Si/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Precursors/ Targets allowed
*Based on stock availability
N.A.
Precursor/ Target loaded inside tool
Target dimensionN.A.
Gases allowedN.A.
Contamination remarksMaterials that don't vaporize at Room Temperature
Last updated on: 20-Jul-2022