Phoenix
| Name of the Equipment | Phoenix |
| Category | litho/analytical |
| Operator | |
| System Owner | Chandan Samanta (NH) 20002653@iitb.ac.in |
| Short Name | |
| Make/ Model | Keysight B1500 (Agilent) SDA/Karl Suss/ PM8 |
| Critical Tool | No |
| Serial Number | 40180 |
| FootPrint | 12ft x 3ft |
| InstallationDate | 11/11/2013 |
| Equipment Type | Electrical characterization tools |
| Location | 2D Materials and Devices Lab |
| AMC | Required |
| Local Dealer | N.A N.A. |
| Actual Dealer | Suss Microtec info@suss.com |
| SOP | SOP/123_SOP.pdf |
| Training & other policy documents | POLICY/123_POLICY.pdf |
| Recipies | |
| Glimpse | GLIMPSE/123_GLIMPSE.pdf |
| Tool Facilities Requirements | Vacuum pump, Temperature Controller |
| Access | Open |
| Lab Phone No | 4456 |
| Substrate allowed | Si/ Ge/ Metal and Materials that don't vaporize at Room Temp. |
| Substrate Dimension | Wafer: 1cm x 1cm - 5cm x 5cm & Pad-Size: Min- 50 micron x 50 micron |
| Chemical allowed | N.A., Si/ Ge/ Metal and Materials that don't vaporize at Room Temp., Si/ Ge/ Metal and Materials that don't vaporize at Room Temp. |
| Precursors/ Targets allowed *Based on stock availability | N.A. |
| Precursor/ Target loaded inside tool | |
| Target dimension | N.A. |
| Gases allowed | N.A. |
| Contamination remarks | Materials that don't vaporize at Room Temperature |