RIGEL (Keysight B1500)
Name of the Equipment | RIGEL (Keysight B1500) |
Category | in line act |
Operator | |
System Owner | Paritosh Meihar 184076012@iitb.ac.in Jayatika (H) Sakhuja 18307r013@iitb.ac.in |
Short Name | |
Make/ Model | Keysight (earlier Agilent) B1500, Keithley K708B s |
Critical Tool | No |
Serial Number | NA |
FootPrint | 1.5 meter x 2.5 meter |
InstallationDate | 2013 |
Equipment Type | Electrical characterization tools |
Location | Device Characterization Lab(DC)(NanoE bldg, 3rd Floor) |
AMC | Required |
Local Dealer | Keysight Technologies India Pvt. Ltd. Keysight Technologies India Pvt. Ltd. 1st Floor, Splendor Forum, Jasola District Centre, New Delhi – 110025 ashutosh_dwivedi@keysight.com |
Actual Dealer | Keysight Technologies India Pvt. Ltd. NA |
SOP | SOP/125_SOP.pdf |
Training & other policy documents | |
Recipies | |
Glimpse | GLIMPSE/125_GLIMPSE.pdf |
Tool Facilities Requirements | CDA, rotary pump |
Access | Open |
Lab Phone No | 4488 Ext Flash 114 |
Substrate allowed | Si/ Ge/ Metal and Materials that don't vaporize at Room Temp. |
Substrate Dimension | Wafer : 1cm x 1cm - 5cm x 5cm & Pad-Size: Min- 50 micron x 50 micron |
Chemical allowed | IPA for cleaning, Si/ Ge/ Metal and Materials that don't vaporize at Room Temp. |
Precursors/ Targets allowed *Based on stock availability | NA |
Precursor/ Target loaded inside tool | |
Target dimension | NA |
Gases allowed | NA |
Contamination remarks |