In Thermal Evaporator
| Name of the Equipment | In Thermal Evaporator |
| Category | gold contaminated |
| Operator | Goma Kumari KC |
| System Owner | Goma Kumari KC gomakc@iitb.ac.in |
| Short Name | |
| Make/ Model | HHV/ 15F6T |
| Critical Tool | No |
| Serial Number | NA |
| FootPrint | 2x3 m |
| InstallationDate | 06/01/2011 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | MBE Clean Room 2 (NanoE bldg, Gr floor) |
| AMC | Not Required |
| Local Dealer | HHV Sunil Chingle - |
| Actual Dealer | HHV Sunil Chingle - |
| SOP | SOP/135_SOP.pdf |
| Training & other policy documents | POLICY/135_POLICY.pdf |
| Recipies | |
| Glimpse | GLIMPSE/135_Glimpse.pdf |
| Tool Facilities Requirements | N2, Chilled water |
| Access | Controlled |
| Lab Phone No | 4488 Ext Flash 109 |
| Substrate allowed | Si, Ge, GaAs GaN, Glass, Quartz |
| Substrate Dimension | Pieces to 2 inch wafer |
| Chemical allowed | NA, Indium only |
| Precursors/ Targets allowed *Based on stock availability | Indium slugs |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | Nitrogen |
| Contamination remarks | Gold contaminated |