Equipment Details

In Thermal Evaporator

Name of the EquipmentIn Thermal Evaporator
Categorygold contaminated
OperatorGoma Kumari KC
System OwnerGoma Kumari KC

Short Name
Make/ ModelHHV/ 15F6T
Critical ToolNo
Serial NumberNA
FootPrint2x3 m
Equipment TypeDeposition, Growth and Annealing systems
LocationMBE Clean Room 2 (NanoE bldg, Gr floor)
AMC Not Required
Local DealerHHV

Sunil Chingle -
Actual DealerHHV

Sunil Chingle -
SOP SOP/135_SOP.pdf
Training & other policy documentsPOLICY/135_POLICY.pdf
Glimpse GLIMPSE/135_Glimpse.pdf
Tool Facilities RequirementsN2, Chilled water
Lab Phone No4488 Ext Flash 109
Substrate allowedSi, Ge, GaAs GaN, Glass, Quartz
Substrate DimensionPieces to 2 inch wafer
Chemical allowedNA, Indium only
Precursors/ Targets allowed
*Based on stock availability
Indium slugs
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNitrogen
Contamination remarksGold contaminated
Last updated on: 20-Jan-2023