Equipment Details


Spinner 2 inch (SU8 PPR)

Name of the EquipmentSpinner 2 inch (SU8 PPR)
Categorylitho/analytical
OperatorAkshata(NH) Bhosle
System OwnerHemant Kshirsagar
hemant@ee.iitb.ac.in

Akshata(NH) Bhosle
akshata@iitb.ac.in

Short Name
Make/ Model/ WS-4008-6NPP/ LIT
Critical ToolNo
Serial Number05626
FootPrint11
InstallationDate
Equipment TypeLithography tools
LocationMicro1 Yellow Room
AMC Not Required
Local DealerM/s Simco

Actual DealerM/s Laurell Techonologies Corporation,441,Industri

E-mail:sales@laurell.com
SOP SOP/137_SOP.pdf
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsN2 gas
AccessOpen
Lab Phone No4493
Substrate allowed2
Substrate Dimension1/4 of 2
Chemical allowedAcetone for cleaning, SU8, PPR, P3HT
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarkswafers to be clean
Last updated on: 20-Jul-2022