Spinner 2 inch (SU8 PPR)
| Name of the Equipment | Spinner 2 inch (SU8 PPR) |
| Category | litho/analytical |
| Operator | Akshata(NH) Bhosle |
| System Owner | Hemant Kshirsagar hemant@ee.iitb.ac.in Akshata(NH) Bhosle akshata@iitb.ac.in |
| Short Name | |
| Make/ Model | / WS-4008-6NPP/ LIT |
| Critical Tool | Yes |
| Serial Number | 05626 |
| FootPrint | 11 |
| InstallationDate | |
| Equipment Type | Lithography tools |
| Location | Micro1 Yellow Room |
| AMC | Not Required |
| Local Dealer | M/s Simco |
| Actual Dealer | M/s Laurell Techonologies Corporation,441,Industri E-mail:sales@laurell.com |
| SOP | SOP/137_SOP.pdf |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | N2 gas |
| Access | Open |
| Lab Phone No | 4493 |
| Substrate allowed | 2 |
| Substrate Dimension | 1/4 of 2 |
| Chemical allowed | Acetone for cleaning, SU8, PPR, P3HT |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | wafers to be clean |