Equipment Details

Spinner 2 inch (PPR)

Name of the EquipmentSpinner 2 inch (PPR)
OperatorAkshata(NH) Bhosle
Hemant Kshirsagar
System OwnerHemant Kshirsagar

Akshata(NH) Bhosle

Short Name
Make/ Model/ WS-400BZ-8NPP/LITE
Critical ToolYes
Serial Number07718
Equipment TypeLithography tools
LocationNano Litho Lab
AMC Required
Local DealerM/s Simco Global Technology & Systems Ltd.

M/s Simco Global Technology & Systems Ltd. 304, Thacker Tower, Sector-17, Vashi, Navi Mumbai 400 705 Tel: 022-27801176 Email: Hirlekar- 9820106336
Actual DealerM/s Laurell Technologies Corporation

M/s Laurell Technologies Corporation 441, Industrial Drive, North Wales, PA 19454-2537 USA Phone: 215-699-7278 Email: Hirlekar- 9820106336
SOP SOP/143_SOP.pdf
Training & other policy documentsPOLICY/143_POLICY.pdf
Glimpse GLIMPSE/143_GLIMPSE.pdf
Tool Facilities RequirementsVacuum Pump, Work benches, exhaust, hot plates, N2 blower
Lab Phone No4411
Substrate allowedSi, Glass, GaAs
Substrate Dimensionmax - 8 inch; min - 10cmx10cm
Chemical allowedPPR only, positive and negative photoresist as well as EBL resist, HMDS
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2
Contamination remarksOutside samples, NCPRE Samples, OE Lab, Na+ & K+ not allowed further information contact SO/Process InCharge
Last updated on: 20-Jan-2023