Equipment Details

Spinner 4 inch (PMMA)

Name of the EquipmentSpinner 4 inch (PMMA)
OperatorAkshata(NH) Bhosle
System OwnerAkshata(NH) Bhosle

Hemant Kshirsagar

Short Name
Make/ ModelLaurell Technologies/ WS-650MZ-23NPP
Critical ToolYes
Serial Number12871
FootPrint45 inch (L) X 55 inch (W) X 50 inch (H)
Equipment TypeLithography tools
LocationNano Litho Lab
AMC Required
Local DealerM/s Simco Global Technology & Systems Ltd.

M/s Simco Global Technology & Systems Ltd. 304, Thacker Tower, Sector-17, Vashi, Nawi Mumbai � 400 705 Tel: 022-27801176 Email: Hirlekar- 9820106336
Actual DealerM/s Laurell Technologies Corporation

M/s Laurell Technologies Corporation 441, Industrial Drive, North Wales, PA 19454-2537 USA Phone: 215-699-7278 Email: Hirlekar- 9820106336
SOP SOP/144_SOP.pdf
Training & other policy documents
Glimpse GLIMPSE/144_GLIMPSE.pdf
Tool Facilities RequirementsVacuum Pump, Work benches, exhaust, hot plates, N2 blower
Lab Phone No4411
Substrate allowedall
Substrate DimensionMax 4
Chemical allowedPMMA only, All that is allowed in NYR
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2
Contamination remarksOutside samples, NCPRE Samples, OE Lab, Na+ & K+ not allowed further information contact SO/Process InCharge
Last updated on: 20-Jan-2023