| Name of the Equipment | Sirius (NBTI Setup) |
| Category | litho/analytical |
| Operator | |
| System Owner | Paritosh Meihar
184076012@iitb.ac.in
|
| Short Name | |
| Make/ Model | Keithley 4200SCS / Karl Suss/ PM8 |
| Critical Tool | No |
| Serial Number | 0473 |
| FootPrint | 2.5X0.5 |
| InstallationDate | 2009 |
| Equipment Type | Electrical characterization tools |
| Location | Device Characterization Lab(DC)(NanoE bldg, 3rd Floor) |
| AMC | Required |
| Local Dealer | NA
NA |
| Actual Dealer | Suss Microtec
info@suss.com |
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | N.A. |
| Access | Open |
| Lab Phone No | 4488 Ext Flash 114 |
| Substrate allowed | Si/ Ge/ Metal and Materials that don't vaporize at Room Temp. |
| Substrate Dimension | Wafer : 1cm x 1cm - 5cm x 5cm & Pad-Size: Min- 50 micron x 50 micron |
| Chemical allowed | N.A., Si/ Ge/ Metal and
Materials that don't
vaporize at Room
Temp. |
Precursors/ Targets allowed
*Based on stock availability | N.A. |
| Precursor/ Target loaded inside tool | |
| Target dimension | N.A. |
| Gases allowed | N.A. |
| Contamination remarks | Materials that don't
vaporize at Room
Temp. |
