Equipment Details

Ultech Furnace Silicon Nitride (SiN)

Name of the EquipmentUltech Furnace Silicon Nitride (SiN)
System Owner
Short Name
Make/ ModelUltech/ NA
Critical ToolNo
Serial NumberNA
FootPrintLenght 5.02 mtr, Breadth 2.15 mtr, Height 2.00mtr
Equipment TypeDeposition, Growth and Annealing systems
LocationNano Lab
AMC Required
Local DealerETS, Bangalore

Mr. Ramesh 09845000788
Actual DealerUltech

8-2, Horim-dong, Dalseo-gu, Dargu, Korea, 704240 Technical Division/ Assistant Manager : Mr. Kyeong-Sin-Kim TEL : 82-53-583-7565 FAX : 82-53-583-6872 H.P : 82-10-4264-3215 E-mail :
SOP SOP/150_SOP.pdf
Training & other policy documentsPOLICY/150_POLICY.pdf
Glimpse GLIMPSE/150_Glimpse.pdf
Tool Facilities RequirementsSilane, Ammonia, Nitrogen, Water line
Lab Phone No4411
Substrate allowedSi
Substrate Dimension4 inch wafer only
Chemical allowedNA, Si, Si/ SiO2
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedSilane, Ammonia, Nitrogen
Contamination remarksRCA cleaned wafers only allowed
Last updated on: 20-Jul-2023