Equipment Details

Ultech Furnace i-poly

Name of the EquipmentUltech Furnace i-poly
Categorygold contaminated
System Owner
Short Name
Make/ ModelUltech/ NA
Critical ToolNo
Serial NumberNA
FootPrintLenght 5.02 mtr , Breadth 2.15 mtr, Height 2.00mtr
Equipment TypeDeposition, Growth and Annealing systems
LocationNano Lab
AMC Required
Local DealerETS, Bangalore

Mr. Ramesh 09845000788
Actual DealerUltech

8-2, Horim-dong, Dalseo-gu, Dargu, Korea, 704240 Technical Division/ Assistant Manager : Mr. Kyeong-Sin-Kim TEL : 82-53-583-7565 FAX : 82-53-583-6872 H.P : 82-10-4264-3215 E-mail :
SOP SOP/152_SOP.pdf
Training & other policy documentsPOLICY/152_POLICY.pdf
Glimpse GLIMPSE/152_Glimpse.pdf
Tool Facilities Requirementschilled Water, GN2, PN2
Lab Phone No4411
Substrate allowedSi
Substrate Dimension4 inch wafer only
Chemical allowedNA, Si/ SiO2, Si
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedSiH4, N2
Contamination remarksOnly RCA clean wafers allowed
Last updated on: 20-Jan-2023