Equipment Details

Ultech Furnace Anneal

Name of the EquipmentUltech Furnace Anneal
System Owner
Short Name
Make/ ModelUltech/ NA
Critical ToolNo
Serial NumberNA
FootPrintLenght 5.02 mtr, Breadth 2.15 mtr, Height 2.00 fo
Equipment TypeDeposition, Growth and Annealing systems
LocationNano Lab
AMC Required
Local DealerETS, Bangalore

Mr. Ramesh 09845000788
Actual DealerUltech

8-2, Horim-dong, Dalseo-gu, Dargu, Korea, 704240 Technical Division/ Assistant Manager : Mr. Kyeong-Sin-Kim TEL : 82-53-583-7565 FAX : 82-53-583-6872 H.P : 82-10-4264-3215 E-mail :
SOP SOP/153_SOP.pdf
Training & other policy documentsPOLICY/153_POLICY.pdf
Glimpse GLIMPSE/153_Glimpse.pdf
Tool Facilities RequirementsNitrogen, Argon, Water line
Lab Phone No4411
Substrate allowedSi
Substrate Dimension4 inch
Chemical allowedNA, SiO2, SiNx
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedArgon, Nitrogen
Contamination remarksWafers from clean chamber are only allowed
Last updated on: 20-Jan-2023