Logitech WSB2 Wafer Substrate Bonding Unit
Name of the Equipment | Logitech WSB2 Wafer Substrate Bonding Unit |
Category | gold contaminated |
Operator | |
System Owner | Kulasekaran Muniappan kulasekaran.m@iitb.ac.in |
Short Name | |
Make/ Model | Logitech/ |
Critical Tool | No |
Serial Number | |
FootPrint | 3 feet by 3 feet |
InstallationDate | 04/03/2011 |
Equipment Type | Miscellaneous |
Location | EC Lab |
AMC | Not Required |
Local Dealer | Lawrence & Mayo 11 Government Place East Kolkata West Bengal 700 069 India |
Actual Dealer | Mr Suman Kundu 11 Government Place East Kolkata West Bengal 700 069 India |
SOP | SOP/160_SOP.pdf |
Training & other policy documents | POLICY/160_POLICY.pdf |
Recipies | |
Glimpse | GLIMPSE/160_Glimpse.pdf |
Tool Facilities Requirements | Vacuum pump, chiller, compressor |
Access | Open |
Lab Phone No | No Number |
Substrate allowed | III-V materials |
Substrate Dimension | 1cm X 1cm |
Chemical allowed | N/A, III-V materials |
Precursors/ Targets allowed *Based on stock availability | N/A |
Precursor/ Target loaded inside tool | |
Target dimension | N/A |
Gases allowed | N/A |
Contamination remarks |