Equipment Details

DektakXT Profilometer

Name of the EquipmentDektakXT Profilometer
OperatorShilpa Kharat
Manisha Bansode
Shahiroze Khetani
System OwnerAnjum Khan

Shilpa Kharat

Short Name
Make/ ModelBruker/ Dektak XT
Critical Tool
Serial Number
FootPrint455 mm W x 550 mm D x 370 mm H (17.9 inch W x 22.6
Equipment TypeMaterial and structural characterization tools
LocationMicro2 Lab
AMC Required
Local DealerIcon Analytical Equipment Pvt. Ltd

Tushar Ph No.9320329883
Actual Dealer

SOP SOP/188_SOP.pdf
Training & other policy documentsPOLICY/188_POLICY.pdf
Glimpse GLIMPSE/188_GLIMPSE.pdf
Tool Facilities RequirementsVacuum pump, clean air
Lab Phone No4464
Substrate allowedSi, Ge, Glass, Sapphire
Substrate DimensionMin - 1cmx1cm, Max- 8 inch wafer
Chemical allowedNA, No sticky and soft sample allowed. Density should be greater than 1.001g/cm3
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksLitho/ Analytical
Last updated on: 20-Jan-2023