Equipment Details

Karl Suss MJB4 Mask Aligner

Name of the EquipmentKarl Suss MJB4 Mask Aligner
OperatorAkshata(NH) Bhosle
Hemant Kshirsagar
System OwnerHemant Kshirsagar

Akshata(NH) Bhosle

Short NameNA
Make/ ModelSuss Microtec/ MJB4
Critical ToolYes
Serial Number06130848
Equipment TypeLithography tools
LocationMicro1 Yellow Room
AMC Required
Local DealerOM Scientific

M/s Om Scientific,Pune Contact person :-Anand Vairagar/Shaliesh Latey( 917563100/9867770801
Actual DealerSuss Microtec

Suss Microtec M/s Suss MicroTec , Germany
SOP SOP/190_SOP.pdf
Training & other policy documentsPOLICY/190_POLICY.pdf
Glimpse GLIMPSE/190_GLIMPSE.pdf
Tool Facilities RequirementsNItrogen gas and CDA
Lab Phone No4405
Substrate allowedSi,GaN, GaAs, Ge
Substrate Dimensionupto 4 inch
Chemical allowedonly photo resist, sio2,si
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionN/A
Gases allowedNitrogen
Contamination remarksSamples must be free of backside contamination. Mask should be checked after each working session. Clean with acetone / IPA or with soft tissue to remove any solid or liquid residues.
Last updated on: 20-Jan-2023