Sputter (Orion)
| Name of the Equipment | Sputter (Orion) |
| Category | gold contaminated |
| Operator | Hemant Kshirsagar Minita Surwade (NH) |
| System Owner | Abhishek Erram 204070024@iitb.ac.in Akanksha Chouhan 174070019@iitb.ac.in |
| Short Name | |
| Make/ Model | AJA international, Inc/ Orion Sputter PHASE |
| Critical Tool | Yes |
| Serial Number | DIT/11/EQP/012/12/00 |
| FootPrint | (l) 2318 mm x (b) 762 mm x (h) 2160mm |
| InstallationDate | 01/25/2014 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Nano Lab |
| AMC | Required |
| Local Dealer | Mr. Varadaraj, Service Executive Engineer Anarghya Innovations and Technology Pvt Ltd, Bengaluru. Ph: +91 80 23376488 M : +91-9743446512 www.anarghyainnotech.com |
| Actual Dealer | AJA Mr. Joe Cronin, Customer Service Engineer AJA International, INC 809 Country Way Scituate, MA 02066 781-545-7365 E-mail: topgun@ajaint.com Web: www.ajaint.com |
| SOP | SOP/197_SOP.pdf |
| Training & other policy documents | POLICY/197_POLICY.pdf |
| Recipies | RECEPIES/197_RECEPIES.pdf |
| Glimpse | GLIMPSE/197_GLIMPSE.pdf |
| Tool Facilities Requirements | chiller, process gases |
| Access | Controlled |
| Lab Phone No | 4411 |
| Substrate allowed | Si, Ge, GaN,GaAs,LSMO,PCMO,YIG,SRO, (No Glass),Lithium Niobate |
| Substrate Dimension | Sample height not more than 3 mm |
| Chemical allowed | IPA, Photoresist, ebeam resist, Nb, NbN, Yb, Sn, Ge, Pt, Au, Gd, IrMn, Cr, YIG, Fe, Ni, Ta, Cu, Ru, Cr, MgO, Al2O3, SnGe alloy, Ti, CoFeB, SiO2, Al, Co, W, Ag, NiFe |
| Precursors/ Targets allowed *Based on stock availability | Yb, Sn, Ge, Pt, Gd, IrMn, Cr,Fe, Ni, Ta, Cu, Ru, Cr, MgO, Al2O3, SnGe alloy, Ti, CoFeB, SiO2, Al, Co, W, Ag, NiFe |
| Precursor/ Target loaded inside tool | |
| Target dimension | 2 inch diameter, 0.250 inch thickness |
| Gases allowed | Ar, N2, CDA |
| Contamination remarks | If someone wants to introduce new material/target, he/she needs to get permission for that.Na+ and K+ are not allowed. For outside/ NCPRE/ Org electronics lab samples, contact SO/ Process engineer. |