Ar-ion Milling
| Name of the Equipment | Ar-ion Milling |
| Category | gold contaminated |
| Operator | |
| System Owner | Abhishek Erram 204070024@iitb.ac.in Rachit Pandey (H) 174076002@iitb.ac.in |
| Short Name | |
| Make/ Model | Excel Instruments+ Kaufman & Robinson, Inc./ |
| Critical Tool | |
| Serial Number | |
| FootPrint | Length 2 mtr, Breadth 1 mtr, Height1.6 |
| InstallationDate | 02/14/2014 |
| Equipment Type | Dry Etch tools |
| Location | Nanoelectronics Processing Lab (NanoE bldg, 1st floor) |
| AMC | Required |
| Local Dealer | Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093 |
| Actual Dealer | Excel Instruments+ Kaufman & Robinson, Inc. Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093 For KRI-SOURCE: Kaufman & Robinson, Inc. 1330 Blue Spruce Drive Fort Collins, CO 80524 Phone: (970) 495-0185 |
| SOP | SOP/209_SOP.pdf |
| Training & other policy documents | POLICY/209_POLICY.pdf |
| Recipies | |
| Glimpse | GLIMPSE/209_GLIMPSE.zip |
| Tool Facilities Requirements | Ar gas, Chiller |
| Access | Open |
| Lab Phone No | 4488 Ext Flash 107 OR 111 |
| Substrate allowed | Any substrate |
| Substrate Dimension | Min - 5mm x 5mm, Min - 25mm x 25mm |
| Chemical allowed | Acetone/ IPA/ Methonal, All |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | Ar |
| Contamination remarks | NA |