| Name of the Equipment | Tube Washer |
| Category | clean |
| Operator | |
| System Owner | Minita Surwade (NH)
minita@iitb.ac.in
|
| Short Name | |
| Make/ Model | / |
| Critical Tool | No |
| Serial Number | |
| FootPrint | |
| InstallationDate | |
| Equipment Type | Miscellaneous |
| Location | Micro1 Lab |
| AMC | Required |
| Local Dealer |
|
| Actual Dealer |
|
| SOP | |
| Training & other policy documents | |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | Exhaust Blower,DI water line |
| Access | Open |
| Lab Phone No | 4405 |
| Substrate allowed | NA |
| Substrate Dimension | |
| Chemical allowed | 2% HF and DI Water, Quartz furnace tube |
Precursors/ Targets allowed
*Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks | |
