Equipment Details


Spinner 2 Inch (PDMS)

Name of the EquipmentSpinner 2 Inch (PDMS)
Categorygold contaminated
OperatorMinita Surwade (NH)
System OwnerMinita Surwade (NH)
minita@iitb.ac.in

Short Name
Make/ ModelNA/ NA
Critical Tool
Serial NumberNA
FootPrintNA
InstallationDate
Equipment TypeMiscellaneous
LocationEC Lab
AMC Not Required
Local DealerNA

NA
Actual DealerNA

NA
SOP
Training & other policy documents
Recipies
Glimpse GLIMPSE/217_GLIMPSE.pdf
Tool Facilities RequirementsNA
AccessOpen
Lab Phone NoNo Number
Substrate allowedGlass, Si, Quartz, GaN, G aAs
Substrate Dimensionminimum quarter of a 2 inch wafer;maximum a 2 inch wafer
Chemical allowedPDMS,
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksclean wafers
Last updated on: 20-Jul-2022