Equipment Details

Sentech Ellipsometer

Name of the EquipmentSentech Ellipsometer
Categoryin line ac
OperatorShilpa Kharat
Pankajkumar Gound
System OwnerDeepti Rukade

Short Name
Make/ ModelSENTECH Instruments/ SE 800
Critical ToolYes
Serial Number11/046
FootPrintLength 1.39 mtr, Breadth 1.44 mtr, Height 1.52
Equipment TypeMaterial and structural characterization tools
LocationNano Lab
AMC Available
Local DealerNitesh Karande

NBP Division Labindia Instrument Pvt. Ltd. 201, Nand Chambers, Near Vandana Cinema, LBS Marg, Thane- 400 602 Mob: 09769940005 Tel: +91-22-2598 6071 Fax: +91-22-2539 8634
Actual Dealer

SOP SOP/25_SOP.pdf
Training & other policy documentsPOLICY/25_POLICY.pdf
Glimpse GLIMPSE/25_GLIMPSE.pdf
Tool Facilities RequirementsNA
Lab Phone No4411
Substrate allowedSi
Substrate Dimensionmin- 1cm , max- 6 inch
Chemical allowedNA, Dielectrics and Polymers
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksIPA should not be used for cleaning of wafer holder
Last updated on: 20-Jan-2023