Ambios XP-2 Profilometer
| Name of the Equipment | Ambios XP-2 Profilometer |
| Category | litho/analytical |
| Operator | |
| System Owner | Anjum Khan anjum04@iitb.ac.in |
| Short Name | |
| Make/ Model | Ambios XP-2/ XP-2 |
| Critical Tool | Yes |
| Serial Number | SN 167 |
| FootPrint | 5 ft x 6ft |
| InstallationDate | 03/30/2007 |
| Equipment Type | Material and structural characterization tools |
| Location | Nanoelectronics Processing Lab (NanoE bldg, 1st floor) |
| AMC | Available |
| Local Dealer | Forevision Metrology Group Chandra Mohan S Manager - Customer Support FOREVISION METROLOGY GROUP Plot No. 35, 1st Floor, Sai Ram Avenue, Road No. 2, Samathapuri, Nagole X Road, Hyderabad � 500 035. A.P., INDIA Tel: 91 (40) 2414 2363 / 2414 2373 Fax: 91 (40) 2404 2383 Mobile:09704944467 E-mail: info@fvmg.in Website: www.fvmg.in |
| Actual Dealer | Ambios Technology Inc. Ambios Technology Inc., 100 Pioneer Street, Suite A, Santa Cruz, CA.95060, U.S.A. Email: info@ambioustech.com |
| SOP | SOP/27_SOP.pdf |
| Training & other policy documents | POLICY/27_POLICY.pdf |
| Recipies | RECEPIES/27_RECEPIES.pdf |
| Glimpse | GLIMPSE/27_Glimpse.pdf |
| Tool Facilities Requirements | Vacuum Pump |
| Access | Open |
| Lab Phone No | 4488 Ext Flash 107 OR 111 |
| Substrate allowed | Si, Glass, Sapphire |
| Substrate Dimension | Min - 1cmx1cm, Max- 8 inch wafer |
| Chemical allowed | NA, No sticky and soft samples allowed,PEDOT |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | NA |
| Contamination remarks |